JPH03123582U - - Google Patents

Info

Publication number
JPH03123582U
JPH03123582U JP3288090U JP3288090U JPH03123582U JP H03123582 U JPH03123582 U JP H03123582U JP 3288090 U JP3288090 U JP 3288090U JP 3288090 U JP3288090 U JP 3288090U JP H03123582 U JPH03123582 U JP H03123582U
Authority
JP
Japan
Prior art keywords
cleaned
hole
cleaning hole
rotating support
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3288090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3288090U priority Critical patent/JPH03123582U/ja
Publication of JPH03123582U publication Critical patent/JPH03123582U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP3288090U 1990-03-30 1990-03-30 Pending JPH03123582U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3288090U JPH03123582U (enrdf_load_stackoverflow) 1990-03-30 1990-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3288090U JPH03123582U (enrdf_load_stackoverflow) 1990-03-30 1990-03-30

Publications (1)

Publication Number Publication Date
JPH03123582U true JPH03123582U (enrdf_load_stackoverflow) 1991-12-16

Family

ID=31536124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3288090U Pending JPH03123582U (enrdf_load_stackoverflow) 1990-03-30 1990-03-30

Country Status (1)

Country Link
JP (1) JPH03123582U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5573234A (en) * 1978-11-30 1980-06-02 Shinwa Elec Works Washing machine of frying pan*etc*
JPS62259447A (ja) * 1986-05-02 1987-11-11 Nec Kyushu Ltd ブラシスクラバ−装置
JPS63193529A (ja) * 1987-02-06 1988-08-10 Toshiba Corp 半導体ウエハの洗浄乾燥装置
JPH01238122A (ja) * 1988-03-18 1989-09-22 Nec Corp 半導体製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5573234A (en) * 1978-11-30 1980-06-02 Shinwa Elec Works Washing machine of frying pan*etc*
JPS62259447A (ja) * 1986-05-02 1987-11-11 Nec Kyushu Ltd ブラシスクラバ−装置
JPS63193529A (ja) * 1987-02-06 1988-08-10 Toshiba Corp 半導体ウエハの洗浄乾燥装置
JPH01238122A (ja) * 1988-03-18 1989-09-22 Nec Corp 半導体製造装置

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