JPH03123099U - - Google Patents

Info

Publication number
JPH03123099U
JPH03123099U JP3049990U JP3049990U JPH03123099U JP H03123099 U JPH03123099 U JP H03123099U JP 3049990 U JP3049990 U JP 3049990U JP 3049990 U JP3049990 U JP 3049990U JP H03123099 U JPH03123099 U JP H03123099U
Authority
JP
Japan
Prior art keywords
power
brake
brake device
shutter
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3049990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0718877Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3049990U priority Critical patent/JPH0718877Y2/ja
Publication of JPH03123099U publication Critical patent/JPH03123099U/ja
Application granted granted Critical
Publication of JPH0718877Y2 publication Critical patent/JPH0718877Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Operating, Guiding And Securing Of Roll- Type Closing Members (AREA)
JP3049990U 1990-03-27 1990-03-27 ブレーキ装置 Expired - Fee Related JPH0718877Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3049990U JPH0718877Y2 (ja) 1990-03-27 1990-03-27 ブレーキ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3049990U JPH0718877Y2 (ja) 1990-03-27 1990-03-27 ブレーキ装置

Publications (2)

Publication Number Publication Date
JPH03123099U true JPH03123099U (enExample) 1991-12-16
JPH0718877Y2 JPH0718877Y2 (ja) 1995-05-01

Family

ID=31533211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3049990U Expired - Fee Related JPH0718877Y2 (ja) 1990-03-27 1990-03-27 ブレーキ装置

Country Status (1)

Country Link
JP (1) JPH0718877Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008210982A (ja) * 2007-02-26 2008-09-11 Tokyo Electron Ltd 半導体製造装置のガス供給システム及びガス供給集積ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008210982A (ja) * 2007-02-26 2008-09-11 Tokyo Electron Ltd 半導体製造装置のガス供給システム及びガス供給集積ユニット

Also Published As

Publication number Publication date
JPH0718877Y2 (ja) 1995-05-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees