JPH03122282U - - Google Patents

Info

Publication number
JPH03122282U
JPH03122282U JP3052490U JP3052490U JPH03122282U JP H03122282 U JPH03122282 U JP H03122282U JP 3052490 U JP3052490 U JP 3052490U JP 3052490 U JP3052490 U JP 3052490U JP H03122282 U JPH03122282 U JP H03122282U
Authority
JP
Japan
Prior art keywords
valve
pump body
cap
pump
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3052490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3052490U priority Critical patent/JPH03122282U/ja
Publication of JPH03122282U publication Critical patent/JPH03122282U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP3052490U 1990-03-27 1990-03-27 Pending JPH03122282U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3052490U JPH03122282U (cs) 1990-03-27 1990-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3052490U JPH03122282U (cs) 1990-03-27 1990-03-27

Publications (1)

Publication Number Publication Date
JPH03122282U true JPH03122282U (cs) 1991-12-13

Family

ID=31533234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3052490U Pending JPH03122282U (cs) 1990-03-27 1990-03-27

Country Status (1)

Country Link
JP (1) JPH03122282U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007514891A (ja) * 2003-12-19 2007-06-07 バーテルズ・ミクロテクニク・ゲゼルシャフト・ミット・ベシュレンクター・ハフツンク 2枚の基板を接合するためのマイクロポンプ、及び接着剤を使用しない接合方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007514891A (ja) * 2003-12-19 2007-06-07 バーテルズ・ミクロテクニク・ゲゼルシャフト・ミット・ベシュレンクター・ハフツンク 2枚の基板を接合するためのマイクロポンプ、及び接着剤を使用しない接合方法
JP4664309B2 (ja) * 2003-12-19 2011-04-06 バーテルズ・ミクロテクニク・ゲゼルシャフト・ミット・ベシュレンクター・ハフツンク 2枚の基板を接合するためのマイクロポンプ

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