JPH03120557U - - Google Patents

Info

Publication number
JPH03120557U
JPH03120557U JP3009990U JP3009990U JPH03120557U JP H03120557 U JPH03120557 U JP H03120557U JP 3009990 U JP3009990 U JP 3009990U JP 3009990 U JP3009990 U JP 3009990U JP H03120557 U JPH03120557 U JP H03120557U
Authority
JP
Japan
Prior art keywords
vacuum vessel
observation
thin film
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3009990U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3009990U priority Critical patent/JPH03120557U/ja
Publication of JPH03120557U publication Critical patent/JPH03120557U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る装置の一実施例を示す平
断面図、第２図は同他の実施例を示す平断面図。
第３図は従来例を示す平断面図。 １……真空容器、５……金属粒子源（ターゲツ
ト）、９……基板、１５……観察窓、１７……透
明体（ガラス）、１８……観察路、１９……屈曲
部、２０……反射鏡、２２……可動式の反射鏡。 FIG. 1 is a plan sectional view showing one embodiment of the device according to the present invention, and FIG. 2 is a plan sectional view showing another embodiment.
FIG. 3 is a plan sectional view showing a conventional example. DESCRIPTION OF SYMBOLS 1... Vacuum container, 5... Metal particle source (target), 9... Substrate, 15... Observation window, 17... Transparent body (glass), 18... Observation path, 19... Bent part, 20... ...Reflector, 22...Movable reflector.

Claims (1)

【実用新案登録請求の範囲】 １ 真空容器１内を観察するための透明体１７を
有する観察窓１５が設けられた薄膜形成装置にお
いて、前記観察窓１５は、真空容器１内部に連通
した屈曲部１９を有する観察路１８を介して設け
られ、且つ該観察路１８の屈曲部１９には反射鏡
２０が設けられてなることを特徴とする薄膜形成
装置。 ２ 前記真空容器１内には、反射鏡２０に真空容
器１内部を映すための可動式の反射鏡２２が設け
られてなることを特徴とする請求項１記載の薄膜
形成装置。[Claims for Utility Model Registration] 1. In a thin film forming apparatus provided with an observation window 15 having a transparent body 17 for observing the inside of the vacuum vessel 1, the observation window 15 has a bent portion communicating with the inside of the vacuum vessel 1. 1. A thin film forming apparatus characterized in that the observation path 18 is provided through an observation path 18 having an observation path 19, and a reflecting mirror 20 is provided at a bent portion 19 of the observation path 18. 2. The thin film forming apparatus according to claim 1, wherein a movable reflecting mirror 22 is provided in the vacuum vessel 1 to reflect the inside of the vacuum vessel 1 onto a reflecting mirror 20.
JP3009990U 1990-03-23 1990-03-23 Pending JPH03120557U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3009990U JPH03120557U (en) 1990-03-23 1990-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3009990U JPH03120557U (en) 1990-03-23 1990-03-23

Publications (1)

Publication Number Publication Date
JPH03120557U true JPH03120557U (en) 1991-12-11

Family

ID=31532835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3009990U Pending JPH03120557U (en) 1990-03-23 1990-03-23

Country Status (1)

Country Link
JP (1) JPH03120557U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142164A (en) * 2012-01-10 2013-07-22 Sumitomo Heavy Ind Ltd Film-forming apparatus
KR102214955B1 (en) * 2020-09-28 2021-02-10 케이스타주식회사 the duster

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334165B2 (en) * 1978-03-10 1988-07-08 Mitsubishi Petrochemical Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334165B2 (en) * 1978-03-10 1988-07-08 Mitsubishi Petrochemical Co

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013142164A (en) * 2012-01-10 2013-07-22 Sumitomo Heavy Ind Ltd Film-forming apparatus
KR102214955B1 (en) * 2020-09-28 2021-02-10 케이스타주식회사 the duster

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