JPH03118600U - - Google Patents

Info

Publication number
JPH03118600U
JPH03118600U JP2714990U JP2714990U JPH03118600U JP H03118600 U JPH03118600 U JP H03118600U JP 2714990 U JP2714990 U JP 2714990U JP 2714990 U JP2714990 U JP 2714990U JP H03118600 U JPH03118600 U JP H03118600U
Authority
JP
Japan
Prior art keywords
accelerator tube
magnetic field
ion accelerator
electrostatic
accelerating electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2714990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2714990U priority Critical patent/JPH03118600U/ja
Publication of JPH03118600U publication Critical patent/JPH03118600U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP2714990U 1990-03-19 1990-03-19 Pending JPH03118600U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2714990U JPH03118600U (enrdf_load_stackoverflow) 1990-03-19 1990-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2714990U JPH03118600U (enrdf_load_stackoverflow) 1990-03-19 1990-03-19

Publications (1)

Publication Number Publication Date
JPH03118600U true JPH03118600U (enrdf_load_stackoverflow) 1991-12-06

Family

ID=31530017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2714990U Pending JPH03118600U (enrdf_load_stackoverflow) 1990-03-19 1990-03-19

Country Status (1)

Country Link
JP (1) JPH03118600U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015137150A1 (ja) * 2014-03-12 2015-09-17 株式会社アルバック イオン照射装置、イオン照射方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015137150A1 (ja) * 2014-03-12 2015-09-17 株式会社アルバック イオン照射装置、イオン照射方法
JP5877936B1 (ja) * 2014-03-12 2016-03-08 株式会社アルバック イオン照射装置、イオン照射方法

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