JPH03118546U - - Google Patents

Info

Publication number
JPH03118546U
JPH03118546U JP2676790U JP2676790U JPH03118546U JP H03118546 U JPH03118546 U JP H03118546U JP 2676790 U JP2676790 U JP 2676790U JP 2676790 U JP2676790 U JP 2676790U JP H03118546 U JPH03118546 U JP H03118546U
Authority
JP
Japan
Prior art keywords
trigger signal
center
beam current
measuring device
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2676790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0754917Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2676790U priority Critical patent/JPH0754917Y2/ja
Publication of JPH03118546U publication Critical patent/JPH03118546U/ja
Application granted granted Critical
Publication of JPH0754917Y2 publication Critical patent/JPH0754917Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2676790U 1990-03-16 1990-03-16 イオン注入装置 Expired - Lifetime JPH0754917Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH03118546U true JPH03118546U (US06878557-20050412-C00065.png) 1991-12-06
JPH0754917Y2 JPH0754917Y2 (ja) 1995-12-18

Family

ID=31529647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2676790U Expired - Lifetime JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0754917Y2 (US06878557-20050412-C00065.png)

Also Published As

Publication number Publication date
JPH0754917Y2 (ja) 1995-12-18

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