JPH03117167U - - Google Patents
Info
- Publication number
- JPH03117167U JPH03117167U JP2609990U JP2609990U JPH03117167U JP H03117167 U JPH03117167 U JP H03117167U JP 2609990 U JP2609990 U JP 2609990U JP 2609990 U JP2609990 U JP 2609990U JP H03117167 U JPH03117167 U JP H03117167U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- fluid passage
- center plate
- plunger
- switching valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2609990U JPH03117167U (de) | 1990-03-16 | 1990-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2609990U JPH03117167U (de) | 1990-03-16 | 1990-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03117167U true JPH03117167U (de) | 1991-12-04 |
Family
ID=31529010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2609990U Pending JPH03117167U (de) | 1990-03-16 | 1990-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03117167U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06185650A (ja) * | 1992-07-29 | 1994-07-08 | Protein Technologies Inc | Ｄｎａシーケンス又はペプチド配列を同時合成する弁マトリックス |
| JP2001519878A (ja) * | 1997-04-04 | 2001-10-23 | ロボバルブ アクチエボーラグ | ダイヤフラムバルブ |
| JP2007285416A (ja) * | 2006-04-17 | 2007-11-01 | Hitachi Metals Ltd | 遮断弁装置及びこれを組み込んだ質量流量制御装置 |
-
1990
- 1990-03-16 JP JP2609990U patent/JPH03117167U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06185650A (ja) * | 1992-07-29 | 1994-07-08 | Protein Technologies Inc | Ｄｎａシーケンス又はペプチド配列を同時合成する弁マトリックス |
| JP2001519878A (ja) * | 1997-04-04 | 2001-10-23 | ロボバルブ アクチエボーラグ | ダイヤフラムバルブ |
| JP2007285416A (ja) * | 2006-04-17 | 2007-11-01 | Hitachi Metals Ltd | 遮断弁装置及びこれを組み込んだ質量流量制御装置 |