JPH03116885A - Exhaust device of gas laser device - Google Patents
Exhaust device of gas laser deviceInfo
- Publication number
- JPH03116885A JPH03116885A JP25211389A JP25211389A JPH03116885A JP H03116885 A JPH03116885 A JP H03116885A JP 25211389 A JP25211389 A JP 25211389A JP 25211389 A JP25211389 A JP 25211389A JP H03116885 A JPH03116885 A JP H03116885A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser
- oscillator
- orifice plate
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 25
- 230000004907 flux Effects 0.000 abstract description 5
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明はガスレーザ発振器への空気の侵入を防止するガ
スレーザ装置の排気装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an exhaust device for a gas laser device that prevents air from entering a gas laser oscillator.
（従来の技術）
従来のガスレーザ装置の排気装置の一実施例について第
２図を参照して説明する。(Prior Art) An embodiment of a conventional exhaust device for a gas laser device will be described with reference to FIG.
図示しない共振器が内蔵された発振器１には、図におい
て右下に新鮮なレーザガスを供給するガスボンベ２が連
結され、左上には図示しない共振器の出射鏡から出射さ
れたレーザ光の伝送路３の基端部３ａの右端が取り付け
られている。基端部３ａの左端には、出射されたレーザ
光を上方へ転送する反射鏡４Ａが取り付けられ、伝送路
３の上部右端３ｂには反射鏡４Ａで反射されたレーザ光
を反射する凹面反射鏡４Ｂが配置される。また、伝送路
３の上部左端３Ｃには、凹面反射鏡４Ｂからのレーザ光
を反射する凹面反射鏡４Ｃが配置され、この凹面反射鏡
４Ｃで反射されたレーザ光は、伝送路３の大気側の端部
に設けられた図示しない集光ミラーで集光されて図示し
ない対象物に照射される。An oscillator 1 with a built-in resonator (not shown) is connected to a gas cylinder 2 that supplies fresh laser gas at the lower right in the figure, and a transmission line 3 for laser light emitted from an output mirror of the resonator (not shown) at the upper left. The right end of the proximal end portion 3a of is attached. A reflecting mirror 4A that transfers the emitted laser beam upward is attached to the left end of the base end 3a, and a concave reflecting mirror that reflects the laser beam reflected by the reflecting mirror 4A is attached to the upper right end 3b of the transmission line 3. 4B is placed. Further, a concave reflector 4C that reflects the laser beam from the concave reflector 4B is disposed at the upper left end 3C of the transmission line 3, and the laser beam reflected by the concave reflector 4C is transmitted to the atmospheric side of the transmission line 3. The light is focused by a condensing mirror (not shown) provided at the end of the beam, and is irradiated onto an object (not shown).
伝送路３の中間内部には、中央部にオリフィス５を有す
るオリフィス板６Ａ、６Ｂが配置され、これらのオリフ
ィス板６Ａ、６Ｂの間には排気ダクト７が接続される。Orifice plates 6A and 6B having an orifice 5 in the center are arranged inside the transmission path 3, and an exhaust duct 7 is connected between these orifice plates 6A and 6B.
この排気ダクト７には排気ポンプ８が接続されている。An exhaust pump 8 is connected to the exhaust duct 7.
ガスボンベ２からは発振器１内のレーザガスが常に所定
の密度と圧力になるようにレーザガスが供給され、伝送
路３から発振器１内に空気が流入しないように排気ポン
プ８により伝送路３内の空気が排気される。Laser gas is supplied from the gas cylinder 2 so that the laser gas in the oscillator 1 always has a predetermined density and pressure, and the exhaust pump 8 pumps the air in the transmission line 3 to prevent air from flowing into the oscillator 1 from the transmission line 3. Exhausted.
（発明が解決しようとする課題）
しかしながら、従来の排気装置においては、伝送路３内
の空気が僅かではあるが発振器ｌ内に侵入し、レーザガ
スの密度が下がって発振器１の出力が低下するという問
題があった。発振器１内への空気の流入を完全に防止す
るためには、排気ポンプ８の容量を増大することが考え
られるが、排気ポンプ８の大型化はコストアップに繋り
、好ましくない。(Problem to be Solved by the Invention) However, in the conventional exhaust system, air in the transmission line 3 enters the oscillator 1, albeit slightly, and the density of the laser gas decreases, causing the output of the oscillator 1 to decrease. There was a problem. In order to completely prevent air from flowing into the oscillator 1, it is possible to increase the capacity of the exhaust pump 8, but increasing the size of the exhaust pump 8 is undesirable because it increases the cost.
本発明は上記の事情を考慮してなされたもので、排気ポ
ンプの容量を増やすことなく、発振器１への空気の侵入
を防止することができるガスレーザ装置の排気装置を提
供することを目的とする。The present invention has been made in consideration of the above circumstances, and aims to provide an exhaust device for a gas laser device that can prevent air from entering the oscillator 1 without increasing the capacity of the exhaust pump. .
（課題を解決するための手段）
本発明は、上記の目的を達成するために、ガスレーザ発
振器から出射されたレーザ光の伝送路に、そのレーザ光
を反射して伝送路の大気側へ伝送する一対の凹面反射鏡
が設けられ、この凹面反射鏡の焦点のガスレーザ発振器
側と大気側にオリフィス板が設けられ、これらのオリフ
ィス板の間に排気ダクトが接続されたガスレーザ装置の
排気装置において、上記ガスレーザ発振器側のオリフィ
ス板は大気側のオリフィス板よりも厚く形成され、ガス
レーザ発振器側から排気ダクト側へレザガスを案内する
ガス流路が形成されたものである。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention reflects a laser beam emitted from a gas laser oscillator onto a transmission path and transmits the laser beam to the atmosphere side of the transmission path. In the exhaust system of the gas laser device, the gas laser oscillator is equipped with a pair of concave reflectors, an orifice plate is provided on the gas laser oscillator side and the atmosphere side of the focal point of the concave reflector, and an exhaust duct is connected between these orifice plates. The orifice plate on the side is formed thicker than the orifice plate on the atmosphere side, and has a gas flow path for guiding the laser gas from the gas laser oscillator side to the exhaust duct side.
（作用）
排気ダクトから伝送路内の空気が排気されると、ガスレ
ーザ発振器側のオリフィス板に形成されたガス流路にお
いて、ガスレーザ発振器側から排気ダクト側ヘレーザガ
スの流れが生じる。したがって、ガスレーザ発振器側の
オリフィス板からガスレーザ発振器側へ空気が流入する
ことを防止し、ガスレーザ発振器への空気の侵入を防止
することができる。(Function) When the air in the transmission path is exhausted from the exhaust duct, a flow of laser gas from the gas laser oscillator side to the exhaust duct side occurs in the gas flow path formed in the orifice plate on the gas laser oscillator side. Therefore, it is possible to prevent air from flowing into the gas laser oscillator side from the orifice plate on the gas laser oscillator side, and to prevent air from entering the gas laser oscillator.
（実施例）
本発明に係るガスレーザ装置の排気装置の一実施例につ
いて添付図面を参照して説明する。(Example) An example of an exhaust device for a gas laser device according to the present invention will be described with reference to the accompanying drawings.
第１図において発振器１には図示しない共振器が内蔵さ
れ、図において右下には新鮮なレーザガスを発振器１内
へ供給するガスボンベ２が接続される。発振器１の左上
には、図示しない共振器の出射鏡から出射されたレーザ
光を転送するための伝送路３の基端部３ａの右端が接続
される。この基端部３ａの左端には、出射されたレーザ
光を上方へ転送する反射鏡４Ａが配置される。伝送路３
の上部右端３ｂには、反射鏡４Ａで反射されたレーザ光
を反射する凹面反射鏡４Ｂが配置され、伝送路３の上部
左端３ｃには、凹面反射鏡４Ｂで反射されたレーザ光を
反射する凹面反射鏡４Ｃが配置される。凹面反射鏡４Ｃ
で反射されたレーザ光は、伝送路３の大気側の端部に設
けられた図示しない集光ミラーで集光されて、図示しな
い対象物に照射される。In FIG. 1, an oscillator 1 has a built-in resonator (not shown), and a gas cylinder 2 for supplying fresh laser gas into the oscillator 1 is connected to the lower right of the figure. Connected to the upper left of the oscillator 1 is the right end of the base end 3a of a transmission line 3 for transmitting laser light emitted from an output mirror of a resonator (not shown). A reflecting mirror 4A that transfers the emitted laser light upward is arranged at the left end of the base end portion 3a. Transmission line 3
A concave reflector 4B is arranged at the upper right end 3b of the transmission line 3 to reflect the laser light reflected by the reflector 4A, and a concave reflector 4B is arranged at the upper left end 3c of the transmission line 3 to reflect the laser light reflected by the concave reflector 4B. A concave reflecting mirror 4C is arranged. Concave reflector 4C
The laser beam reflected by the transmission line 3 is focused by a condensing mirror (not shown) provided at the end of the transmission line 3 on the atmospheric side, and is irradiated onto an object (not shown).
上記凹面反射鏡４Ｂと凹面反射鏡４Ｃとの中間部の焦点
付近ではレーザ光の光束が細くなっており、この焦点の
ガスレーザ発振器側と大気側の伝送路３内にオリフィス
板６Ａ、６Ｂが配置される。The luminous flux of the laser beam becomes narrow near the focal point between the concave reflecting mirror 4B and the concave reflecting mirror 4C, and orifice plates 6A and 6B are arranged in the transmission path 3 on the gas laser oscillator side and the atmosphere side of this focal point. be done.
これらのオリフィス板６Ａ、６Ｂの間の伝送路３には排
気ダクト７が接続され、この排気ダクト７に排気ポンプ
８が取り付けられる。An exhaust duct 7 is connected to the transmission path 3 between these orifice plates 6A and 6B, and an exhaust pump 8 is attached to this exhaust duct 7.
上記オリフィス板６Ａ、６Ｂのうち、大気側のオリフィ
ス板６Ｂは比較的薄く形成され、中央部にレーザ光の光
束を制限しない程度に狭いオリフィス５が形成される。Of the orifice plates 6A and 6B, the orifice plate 6B on the atmosphere side is formed relatively thin, and the orifice 5 is formed in the center so narrow that it does not restrict the luminous flux of the laser beam.
発振器側のオリフィス板６Ａは大気側のオリフィス板６
Ｂよりも厚く形成され１．中央部に発振器側から排気ダ
クト側ヘレーザガスを案内するガス流路９が形成される
。ガス流路９はレーザ光の光束を制限しない程度にでき
る限り狭く形成される。すなわち、オリフィス板６Ａの
レーザ光入射側は比較的広く形成され、レーザ光の出射
側は狭く形成され、外周部はレーザ光の光束に沿って傾
斜している。The orifice plate 6A on the oscillator side is the orifice plate 6 on the atmosphere side.
It is formed thicker than B.1. A gas flow path 9 is formed in the center for guiding laser gas from the oscillator side to the exhaust duct side. The gas flow path 9 is formed as narrow as possible without restricting the luminous flux of the laser beam. That is, the laser beam incident side of the orifice plate 6A is formed relatively wide, the laser beam output side is formed narrowly, and the outer peripheral portion is inclined along the beam of the laser beam.
次に作用について説明する。Next, the effect will be explained.
発振器１から出射されたレーザ光は反射鏡４Ａにより反
射されて凹面反射鏡４Ｂへ転送され、凹面反射鏡４Ｂで
反射されたレーザ光はその焦点へ向って集束し、焦点を
超えた後再び拡がって凹面反射鏡４Ｃにより反射される
。凹面反射鏡４Ｃにより反射されたレーザ光は平行光線
束となり、図示しない集光ミラーで集光された後、対象
物に照射される。The laser beam emitted from the oscillator 1 is reflected by the reflecting mirror 4A and transferred to the concave reflecting mirror 4B, and the laser beam reflected by the concave reflecting mirror 4B is focused toward its focal point, and after exceeding the focal point, it spreads again. and is reflected by the concave reflecting mirror 4C. The laser beam reflected by the concave reflecting mirror 4C becomes a bundle of parallel light rays, and after being condensed by a condensing mirror (not shown), the object is irradiated.
ガスボンベ２からは発振器１内のレーザガスが常に所定
の密度と圧力になるように新鮮なレーザガスが供給され
ている。このレーザガスは、排気ポンプ８が運転される
ことにより発振器１から伝送路３の基端部３ ａ ｓ上
部右端３ｂを通ってオリフィス板６Ａ側へ流れる。そし
て、オリフィス板６Δに形成されたガス流路９内を発振
器側から排気ダクト側へ流れる。一方、伝送路３の大気
側から流入した空気は伝送路３の上部左端３Ｃからオリ
フィス板６Ｂ側へ流れ、オリフィス５を通って排気ダク
ト７側へ流入する。このとき、発振器側のオリフィス板
６Ａのガス流路９において発振器側から排気ダクト側へ
のレーザガスの流れが生じているため、空気がオリフィ
ス板６Ａに形成されたガス流路９を通って発振器側へ侵
入することが防止される。したがって、上記実施例によ
れば排気ポンプ８の容量を増やすことなく、発振器１内
への空気の侵入を防止することができる。Fresh laser gas is supplied from the gas cylinder 2 so that the laser gas in the oscillator 1 always has a predetermined density and pressure. When the exhaust pump 8 is operated, this laser gas flows from the oscillator 1 through the base end 3 a s upper right end 3 b of the transmission line 3 to the orifice plate 6A side. Then, the gas flows from the oscillator side to the exhaust duct side in the gas flow path 9 formed in the orifice plate 6Δ. On the other hand, air flowing in from the atmospheric side of the transmission line 3 flows from the upper left end 3C of the transmission line 3 toward the orifice plate 6B, passes through the orifice 5, and flows into the exhaust duct 7 side. At this time, since the laser gas flows from the oscillator side to the exhaust duct side in the gas flow path 9 of the orifice plate 6A on the oscillator side, air passes through the gas flow path 9 formed in the orifice plate 6A to the oscillator side. is prevented from entering. Therefore, according to the embodiment described above, it is possible to prevent air from entering the oscillator 1 without increasing the capacity of the exhaust pump 8.
本発明はガスレーザ発振器側のオリフィス板が大気側の
オリフィス板よりも厚く形成され、このオリフィス板に
ガスレーザ発振器側から排気ダクト側へレーザガスを案
内するガス流路が形成されたから、ガス流路においてガ
スレーザ発振器側から排気ダクト側へのレーザガスの流
れを生じさせ、ガスレーザ発振器側への空気の侵入を防
止することにより、ガスレーザ発振器内への空気（７）
侵入を防止することができる。In the present invention, the orifice plate on the gas laser oscillator side is formed thicker than the orifice plate on the atmosphere side, and a gas flow path is formed in this orifice plate to guide the laser gas from the gas laser oscillator side to the exhaust duct side. By causing a flow of laser gas from the oscillator side to the exhaust duct side and preventing air from entering the gas laser oscillator side, air (7) can be prevented from entering the gas laser oscillator.
Intrusion can be prevented.
第１図は本発明に係るガスレーザ装置の排気装置の一実
施例を示す断面図、第２図は従来の排気装置を示す断面
図である。
１・・・発振器、２・・・ガスボンベ、３・・・伝送路
、４Ｂ、４Ｃ・・・凹面反射鏡、６Ａ、６Ｂ・・・オリ
フィス板、７・・・排気ダクト、８・・・排気ポンプ、
９・・・ガス流路。FIG. 1 is a sectional view showing an embodiment of an exhaust device for a gas laser device according to the present invention, and FIG. 2 is a sectional view showing a conventional exhaust device. 1... Oscillator, 2... Gas cylinder, 3... Transmission line, 4B, 4C... Concave reflector, 6A, 6B... Orifice plate, 7... Exhaust duct, 8... Exhaust pump,
9... Gas flow path.
Claims (1)
そのレーザ光を反射して伝送路の大気側へ伝送する一対
の凹面反射鏡が設けられ、この凹面反射鏡の焦点のガス
レーザ発振器側と大気側にオリフィス板が設けられ、こ
れらのオリフィス板の間に排気ダクトが接続されたガス
レーザ装置の排気装置において、上記ガスレーザ発振器
側のオリフィス板は大気側のオリフィス板よりも厚く形
成され、ガスレーザ発振器側から排気ダクト側へレーザ
ガスを案内するガス流路が形成されたことを特徴とする
ガスレーザ装置の排気装置。In the transmission path of the laser light emitted from the gas laser oscillator,
A pair of concave reflectors are provided to reflect the laser light and transmit it to the atmosphere side of the transmission line. Orifice plates are provided on the gas laser oscillator side and the atmosphere side of the focal point of this concave reflector, and between these orifice plates there is an exhaust gas. In an exhaust system for a gas laser device to which a duct is connected, the orifice plate on the gas laser oscillator side is formed thicker than the orifice plate on the atmosphere side, and a gas flow path is formed to guide the laser gas from the gas laser oscillator side to the exhaust duct side. An exhaust device for a gas laser device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25211389A JPH03116885A (en) | 1989-09-29 | 1989-09-29 | Exhaust device of gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25211389A JPH03116885A (en) | 1989-09-29 | 1989-09-29 | Exhaust device of gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116885A true JPH03116885A (en) | 1991-05-17 |
Family
ID=17232659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25211389A Pending JPH03116885A (en) | 1989-09-29 | 1989-09-29 | Exhaust device of gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116885A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7057225B2 (en) | 1995-09-20 | 2006-06-06 | Micron Technology, Inc. | Semiconductor memory circuitry |
| US8299514B2 (en) | 1995-09-20 | 2012-10-30 | Round Rock Research, Llc | High density integrated circuitry for semiconductor memory having memory cells with a minimum capable photolithographic feature dimension |
| CN113287234A (en) * | 2019-02-20 | 2021-08-20 | 极光先进雷射株式会社 | Gas laser device, method for emitting laser beam from gas laser device, and method for manufacturing electronic device |
-
1989
- 1989-09-29 JP JP25211389A patent/JPH03116885A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7057225B2 (en) | 1995-09-20 | 2006-06-06 | Micron Technology, Inc. | Semiconductor memory circuitry |
| US8299514B2 (en) | 1995-09-20 | 2012-10-30 | Round Rock Research, Llc | High density integrated circuitry for semiconductor memory having memory cells with a minimum capable photolithographic feature dimension |
| CN113287234A (en) * | 2019-02-20 | 2021-08-20 | 极光先进雷射株式会社 | Gas laser device, method for emitting laser beam from gas laser device, and method for manufacturing electronic device |
| CN113287234B (en) * | 2019-02-20 | 2023-08-01 | 极光先进雷射株式会社 | Gas laser device, method for emitting laser beam of gas laser device, and method for manufacturing electronic device |
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