JPH03116028U - - Google Patents
Info
- Publication number
- JPH03116028U JPH03116028U JP2521390U JP2521390U JPH03116028U JP H03116028 U JPH03116028 U JP H03116028U JP 2521390 U JP2521390 U JP 2521390U JP 2521390 U JP2521390 U JP 2521390U JP H03116028 U JPH03116028 U JP H03116028U
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- susceptor
- reaction tube
- wafer
- frequency coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521390U JPH03116028U (OSRAM) | 1990-03-12 | 1990-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521390U JPH03116028U (OSRAM) | 1990-03-12 | 1990-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116028U true JPH03116028U (OSRAM) | 1991-12-02 |
Family
ID=31528155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2521390U Pending JPH03116028U (OSRAM) | 1990-03-12 | 1990-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116028U (OSRAM) |
-
1990
- 1990-03-12 JP JP2521390U patent/JPH03116028U/ja active Pending
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