JPH03115267U - - Google Patents
Info
- Publication number
- JPH03115267U JPH03115267U JP2383790U JP2383790U JPH03115267U JP H03115267 U JPH03115267 U JP H03115267U JP 2383790 U JP2383790 U JP 2383790U JP 2383790 U JP2383790 U JP 2383790U JP H03115267 U JPH03115267 U JP H03115267U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- liquid
- chamber
- hole
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims 1
- 230000005489 elastic deformation Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2383790U JPH03115267U (ar) | 1990-03-09 | 1990-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2383790U JPH03115267U (ar) | 1990-03-09 | 1990-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115267U true JPH03115267U (ar) | 1991-11-28 |
Family
ID=31526818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2383790U Pending JPH03115267U (ar) | 1990-03-09 | 1990-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115267U (ar) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1182786A (ja) * | 1997-09-11 | 1999-03-26 | Smc Corp | サックバックバルブの制御方法 |
| KR20140109258A (ko) * | 2013-03-01 | 2014-09-15 | 도쿄엘렉트론가부시키가이샤 | 액 공급 장치 |
| CN113217672A (zh) * | 2021-05-06 | 2021-08-06 | 长江存储科技有限责任公司 | 阀体结构及具有其的晶圆清洗系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266884A (ja) * | 1985-05-17 | 1986-11-26 | Dainippon Screen Mfg Co Ltd | 液体引戻し弁 |
-
1990
- 1990-03-09 JP JP2383790U patent/JPH03115267U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266884A (ja) * | 1985-05-17 | 1986-11-26 | Dainippon Screen Mfg Co Ltd | 液体引戻し弁 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1182786A (ja) * | 1997-09-11 | 1999-03-26 | Smc Corp | サックバックバルブの制御方法 |
| KR20140109258A (ko) * | 2013-03-01 | 2014-09-15 | 도쿄엘렉트론가부시키가이샤 | 액 공급 장치 |
| JP2014168734A (ja) * | 2013-03-01 | 2014-09-18 | Tokyo Electron Ltd | 液供給装置 |
| CN113217672A (zh) * | 2021-05-06 | 2021-08-06 | 长江存储科技有限责任公司 | 阀体结构及具有其的晶圆清洗系统 |