JPH03113110U - - Google Patents
Info
- Publication number
- JPH03113110U JPH03113110U JP2239490U JP2239490U JPH03113110U JP H03113110 U JPH03113110 U JP H03113110U JP 2239490 U JP2239490 U JP 2239490U JP 2239490 U JP2239490 U JP 2239490U JP H03113110 U JPH03113110 U JP H03113110U
- Authority
- JP
- Japan
- Prior art keywords
- types
- lens
- lens holding
- surface roughness
- objective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000003746 surface roughness Effects 0.000 claims description 4
- 230000035559 beat frequency Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990022394U JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990022394U JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03113110U true JPH03113110U (US07179912-20070220-C00144.png) | 1991-11-19 |
JP2514577Y2 JP2514577Y2 (ja) | 1996-10-23 |
Family
ID=31525404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990022394U Expired - Lifetime JP2514577Y2 (ja) | 1990-03-06 | 1990-03-06 | 光学式表面粗さ測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2514577Y2 (US07179912-20070220-C00144.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010539471A (ja) * | 2008-02-13 | 2010-12-16 | エスエヌユー プレシジョン カンパニー,リミテッド | 厚さ測定装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616707U (ja) * | 1984-06-18 | 1986-01-16 | 株式会社 小坂研究所 | 微細形状測定器 |
JPH01245104A (ja) * | 1988-02-09 | 1989-09-29 | Carl Zeiss:Fa | 顕微鏡的構造を測定する装置を有する顕微鏡 |
JPH0217604U (US07179912-20070220-C00144.png) * | 1988-07-20 | 1990-02-05 |
-
1990
- 1990-03-06 JP JP1990022394U patent/JP2514577Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616707U (ja) * | 1984-06-18 | 1986-01-16 | 株式会社 小坂研究所 | 微細形状測定器 |
JPH01245104A (ja) * | 1988-02-09 | 1989-09-29 | Carl Zeiss:Fa | 顕微鏡的構造を測定する装置を有する顕微鏡 |
JPH0217604U (US07179912-20070220-C00144.png) * | 1988-07-20 | 1990-02-05 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010539471A (ja) * | 2008-02-13 | 2010-12-16 | エスエヌユー プレシジョン カンパニー,リミテッド | 厚さ測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2514577Y2 (ja) | 1996-10-23 |