JPH03110834U - - Google Patents
Info
- Publication number
- JPH03110834U JPH03110834U JP1990020636U JP2063690U JPH03110834U JP H03110834 U JPH03110834 U JP H03110834U JP 1990020636 U JP1990020636 U JP 1990020636U JP 2063690 U JP2063690 U JP 2063690U JP H03110834 U JPH03110834 U JP H03110834U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- temperature
- cooling water
- silicon
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020636U JPH03110834U (enExample) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020636U JPH03110834U (enExample) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110834U true JPH03110834U (enExample) | 1991-11-13 |
Family
ID=31523723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990020636U Pending JPH03110834U (enExample) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110834U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (ja) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | 圧縮袋の排気バルブ |
-
1990
- 1990-02-28 JP JP1990020636U patent/JPH03110834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007161337A (ja) * | 2005-12-16 | 2007-06-28 | Suruga Co Ltd | 圧縮袋の排気バルブ |