JPH03110830U - - Google Patents
Info
- Publication number
- JPH03110830U JPH03110830U JP1912790U JP1912790U JPH03110830U JP H03110830 U JPH03110830 U JP H03110830U JP 1912790 U JP1912790 U JP 1912790U JP 1912790 U JP1912790 U JP 1912790U JP H03110830 U JPH03110830 U JP H03110830U
- Authority
- JP
- Japan
- Prior art keywords
- container
- supply port
- gas supply
- gas
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 3
- 239000011344 liquid material Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1912790U JPH03110830U (enrdf_load_stackoverflow) | 1990-02-27 | 1990-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1912790U JPH03110830U (enrdf_load_stackoverflow) | 1990-02-27 | 1990-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110830U true JPH03110830U (enrdf_load_stackoverflow) | 1991-11-13 |
Family
ID=31522265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1912790U Pending JPH03110830U (enrdf_load_stackoverflow) | 1990-02-27 | 1990-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110830U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231709A (ja) * | 2000-10-23 | 2002-08-16 | Applied Materials Inc | ユースポイントにおける前駆物質の気化 |
-
1990
- 1990-02-27 JP JP1912790U patent/JPH03110830U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231709A (ja) * | 2000-10-23 | 2002-08-16 | Applied Materials Inc | ユースポイントにおける前駆物質の気化 |
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