JPH03110830U

JPH03110830U -

Info

Publication number: JPH03110830U
Application number: JP1912790U
Authority: JP
Priority date: 1990-02-27
Filing date: 1990-02-27
Publication date: 1991-11-13

Description

[Brief explanation of drawings]

第１図は本考案の第１実施例の縦断面図、第２
図は有機金属が減少された際の一部の断面図、第
３図は本考案の第２実施例の縦断面図、第４図は
有機金属が減少された際の横断面図である。１……容器、２……ガス供給ポート、３……取
出しポート、４……絶縁材、５……フランジ、６
……浮き輪、７……垂れ線、８，９……端子ロツ
ド、１０，１１……端子板、Ｍ……有機金属（材
料）。 Fig. 1 is a longitudinal sectional view of the first embodiment of the present invention, and the second
The figure is a cross-sectional view of a part when the organometallic content is reduced, FIG. 3 is a vertical cross-sectional view of the second embodiment of the present invention, and FIG. 4 is a cross-sectional view when the organometallic content is reduced. 1... Container, 2... Gas supply port, 3... Extraction port, 4... Insulating material, 5... Flange, 6
...Floating ring, 7... Hanging wire, 8, 9... Terminal rod, 10, 11... Terminal plate, M... Organic metal (material).

Claims

[Claims for Utility Model Registration] 1. A container made of a conductive material capable of sealing a liquid material therein, a gas supply port penetrating the container to supply gas into the material, and a gas supply port for supplying gas into the material. In the material supply bubbler, the gas supply port is made of a conductive material supported in an insulating state by the container, and has a flange integrally at its lower end; A conductive floating ring that floats on the liquid surface of the material is fitted, and the floating ring has a conductive drop that comes into contact with the bottom surface of the container when the floating ring lowers to the flange position along with the liquid level. A material supply bubbler characterized by connecting wires. 2. A material supply bubbler comprising a container in which a material can be sealed, a gas supply port that passes through the container and supplies gas into the material, and an extraction port that takes out the gasified material from the container,
On both sides of the gas supply port, a pair of terminals made of a conductive material with a part protruding outside the container are disposed facing each other, and the gas supply port has a conductive material floating on the upper surface of the material. Insert the float of
A material supply bubbler characterized in that the float is configured to contact each of the terminals when the float drops to a predetermined height along with the liquid level.