JPH0311055U - - Google Patents
Info
- Publication number
- JPH0311055U JPH0311055U JP6940989U JP6940989U JPH0311055U JP H0311055 U JPH0311055 U JP H0311055U JP 6940989 U JP6940989 U JP 6940989U JP 6940989 U JP6940989 U JP 6940989U JP H0311055 U JPH0311055 U JP H0311055U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pressed
- processing apparatus
- back plate
- cathode body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6940989U JPH069012Y2 (ja) | 1989-06-14 | 1989-06-14 | 真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6940989U JPH069012Y2 (ja) | 1989-06-14 | 1989-06-14 | 真空処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0311055U true JPH0311055U (sv) | 1991-02-01 |
| JPH069012Y2 JPH069012Y2 (ja) | 1994-03-09 |
Family
ID=31604687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6940989U Expired - Lifetime JPH069012Y2 (ja) | 1989-06-14 | 1989-06-14 | 真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069012Y2 (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011149094A (ja) * | 2009-12-25 | 2011-08-04 | Canon Anelva Corp | 成膜装置及びクリーニング方法 |
-
1989
- 1989-06-14 JP JP6940989U patent/JPH069012Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011149094A (ja) * | 2009-12-25 | 2011-08-04 | Canon Anelva Corp | 成膜装置及びクリーニング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069012Y2 (ja) | 1994-03-09 |