JPH03109150U - - Google Patents
Info
- Publication number
- JPH03109150U JPH03109150U JP1693590U JP1693590U JPH03109150U JP H03109150 U JPH03109150 U JP H03109150U JP 1693590 U JP1693590 U JP 1693590U JP 1693590 U JP1693590 U JP 1693590U JP H03109150 U JPH03109150 U JP H03109150U
- Authority
- JP
- Japan
- Prior art keywords
- linearly polarized
- light
- polarized light
- types
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693590U JP2501738Y2 (ja) | 1990-02-22 | 1990-02-22 | 光学式表面粗さ測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693590U JP2501738Y2 (ja) | 1990-02-22 | 1990-02-22 | 光学式表面粗さ測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109150U true JPH03109150U (cs) | 1991-11-08 |
| JP2501738Y2 JP2501738Y2 (ja) | 1996-06-19 |
Family
ID=31520175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1693590U Expired - Lifetime JP2501738Y2 (ja) | 1990-02-22 | 1990-02-22 | 光学式表面粗さ測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501738Y2 (cs) |
-
1990
- 1990-02-22 JP JP1693590U patent/JP2501738Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2501738Y2 (ja) | 1996-06-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100225923B1 (ko) | 이상 회절 간섭계 | |
| JPH04151501A (ja) | 干渉計センサ | |
| JPH03109150U (cs) | ||
| JPH02146306U (cs) | ||
| JPH0222503A (ja) | レーザ干渉測定装置 | |
| JP2949847B2 (ja) | 光学式表面粗さ測定装置 | |
| JP2891715B2 (ja) | 縞走査型干渉測定装置 | |
| JP2950004B2 (ja) | 共焦点レーザ顕微鏡 | |
| JPH03113110U (cs) | ||
| JPS61105805U (cs) | ||
| JPS598762B2 (ja) | カンシヨウケイオシヨウシタソクテイホウ | |
| JPH03195907A (ja) | 偏光フィゾー干渉計 | |
| JPH0549922B2 (cs) | ||
| JPS6052371B2 (ja) | 焦点位置測定装置 | |
| SU1610270A1 (ru) | Двухкоординатный фотоэлектрический автоколлиматор | |
| JP2003042710A (ja) | 光ヘテロダイン干渉計装置 | |
| JPH02259512A (ja) | 一体型干渉測定装置 | |
| US9869540B1 (en) | Displacement measuring system and machining system comprising the same | |
| JPH0742087Y2 (ja) | 光学式表面粗さ測定装置 | |
| SU1619031A1 (ru) | Оптико-электронное устройство дл формировани и пространственного отслеживани модулированного оптического пучка | |
| JPH0465612A (ja) | 光学式表面粗さ測定方法および装置 | |
| JPH074496Y2 (ja) | 非接触変位計 | |
| JP3618455B2 (ja) | 二軸レーザ測長機 | |
| JP2559511Y2 (ja) | 長さ基準装置 | |
| JPH03125909A (ja) | 光学測定装置 |