JPH03107648U - - Google Patents
Info
- Publication number
- JPH03107648U JPH03107648U JP1465690U JP1465690U JPH03107648U JP H03107648 U JPH03107648 U JP H03107648U JP 1465690 U JP1465690 U JP 1465690U JP 1465690 U JP1465690 U JP 1465690U JP H03107648 U JPH03107648 U JP H03107648U
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- wall
- cover plate
- control sensor
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990014656U JPH0648259Y2 (ja) | 1990-02-19 | 1990-02-19 | クリーンルーム用センサ類の取付構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990014656U JPH0648259Y2 (ja) | 1990-02-19 | 1990-02-19 | クリーンルーム用センサ類の取付構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03107648U true JPH03107648U (de) | 1991-11-06 |
| JPH0648259Y2 JPH0648259Y2 (ja) | 1994-12-12 |
Family
ID=31518004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990014656U Expired - Lifetime JPH0648259Y2 (ja) | 1990-02-19 | 1990-02-19 | クリーンルーム用センサ類の取付構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648259Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5644545A (en) * | 1979-09-20 | 1981-04-23 | Matsushita Electric Ind Co Ltd | Controller of air conditioner |
| JPS618857U (ja) * | 1985-05-22 | 1986-01-20 | 大成建設株式会社 | 建物における強制通風式温湿度測定装置 |
-
1990
- 1990-02-19 JP JP1990014656U patent/JPH0648259Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5644545A (en) * | 1979-09-20 | 1981-04-23 | Matsushita Electric Ind Co Ltd | Controller of air conditioner |
| JPS618857U (ja) * | 1985-05-22 | 1986-01-20 | 大成建設株式会社 | 建物における強制通風式温湿度測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648259Y2 (ja) | 1994-12-12 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |