JPH03107648U - - Google Patents

Info

Publication number
JPH03107648U
JPH03107648U JP1465690U JP1465690U JPH03107648U JP H03107648 U JPH03107648 U JP H03107648U JP 1465690 U JP1465690 U JP 1465690U JP 1465690 U JP1465690 U JP 1465690U JP H03107648 U JPH03107648 U JP H03107648U
Authority
JP
Japan
Prior art keywords
partition wall
wall
cover plate
control sensor
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1465690U
Other languages
Japanese (ja)
Other versions
JPH0648259Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990014656U priority Critical patent/JPH0648259Y2/en
Publication of JPH03107648U publication Critical patent/JPH03107648U/ja
Application granted granted Critical
Publication of JPH0648259Y2 publication Critical patent/JPH0648259Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Ventilation (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施態様によるクリーンル
ーム用制御センサ類の取付構造を説明する断面図
、第２図は排気口の他の実施態様を説明する断面
図、第３図は従来構造を説明する断面図である。 １……間仕切壁、２……表面材、３……断熱材
、４……開口部、５……制御用センサ、６……ケ
ース、７……フランジ部、８……上面、９……内
壁面、１０……傾斜面、１１……排気口、１２…
…前部カバープレート、１３……超小型換気扇。 Fig. 1 is a sectional view illustrating a mounting structure for clean room control sensors according to one embodiment of the present invention, Fig. 2 is a sectional view illustrating another embodiment of the exhaust port, and Fig. 3 is a sectional view illustrating a conventional structure. FIG. DESCRIPTION OF SYMBOLS 1... Partition wall, 2... Surface material, 3... Heat insulating material, 4... Opening, 5... Control sensor, 6... Case, 7... Flange portion, 8... Upper surface, 9... Inner wall surface, 10... Inclined surface, 11... Exhaust port, 12...
...Front cover plate, 13...Ultra small ventilation fan.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クリーンルームを形成する間仕切壁の室外部に
突出するようにう配置し且つ前記間仕切壁に形成
した開口部に接する面を解放すると共に、上面に
排気口を有し且つ前記間仕切壁の壁面と平行な内
壁面を制御用センサの取付可能面に設けて前記開
口部に気密に取り付けた略箱体と、前記制御用セ
ンサの前面に位置し且つ前記間仕切壁の壁面に沿
つた位置に着脱自在な前部カバープレートとを備
えたことを特徴とするクリーンルーム用センサ類
の取付構造。 A partition wall forming a clean room is arranged so as to protrude outside the room, and the surface in contact with the opening formed in the partition wall is open, and has an exhaust port on the upper surface and is parallel to the wall surface of the partition wall. a substantially box-like body whose inner wall surface is provided on a surface on which the control sensor can be attached and is airtightly attached to the opening; and a front which is located in front of the control sensor and is detachable at a position along the wall surface of the partition wall. A mounting structure for clean room sensors, characterized by comprising a cover plate and a cover plate.
JP1990014656U 1990-02-19 1990-02-19 Mounting structure for clean room sensors Expired - Lifetime JPH0648259Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990014656U JPH0648259Y2 (en) 1990-02-19 1990-02-19 Mounting structure for clean room sensors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990014656U JPH0648259Y2 (en) 1990-02-19 1990-02-19 Mounting structure for clean room sensors

Publications (2)

Publication Number Publication Date
JPH03107648U true JPH03107648U (en) 1991-11-06
JPH0648259Y2 JPH0648259Y2 (en) 1994-12-12

Family

ID=31518004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990014656U Expired - Lifetime JPH0648259Y2 (en) 1990-02-19 1990-02-19 Mounting structure for clean room sensors

Country Status (1)

Country Link
JP (1) JPH0648259Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644545A (en) * 1979-09-20 1981-04-23 Matsushita Electric Ind Co Ltd Controller of air conditioner
JPS618857U (en) * 1985-05-22 1986-01-20 大成建設株式会社 Forced ventilation temperature and humidity measuring device for buildings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644545A (en) * 1979-09-20 1981-04-23 Matsushita Electric Ind Co Ltd Controller of air conditioner
JPS618857U (en) * 1985-05-22 1986-01-20 大成建設株式会社 Forced ventilation temperature and humidity measuring device for buildings

Also Published As

Publication number Publication date
JPH0648259Y2 (en) 1994-12-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term