JPH03107588U - - Google Patents

Info

Publication number
JPH03107588U
JPH03107588U JP1711790U JP1711790U JPH03107588U JP H03107588 U JPH03107588 U JP H03107588U JP 1711790 U JP1711790 U JP 1711790U JP 1711790 U JP1711790 U JP 1711790U JP H03107588 U JPH03107588 U JP H03107588U
Authority
JP
Japan
Prior art keywords
valve
bonnet
high vacuum
vacuum pressure
jacket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1711790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH077667Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990017117U priority Critical patent/JPH077667Y2/ja
Publication of JPH03107588U publication Critical patent/JPH03107588U/ja
Application granted granted Critical
Publication of JPH077667Y2 publication Critical patent/JPH077667Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP1990017117U 1990-02-22 1990-02-22 高真空圧バルブ Expired - Lifetime JPH077667Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990017117U JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990017117U JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Publications (2)

Publication Number Publication Date
JPH03107588U true JPH03107588U (en, 2012) 1991-11-06
JPH077667Y2 JPH077667Y2 (ja) 1995-02-22

Family

ID=31520348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990017117U Expired - Lifetime JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Country Status (1)

Country Link
JP (1) JPH077667Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102733559B1 (ko) * 2019-05-30 2024-11-25 주식회사 원익아이피에스 밸브조립체 및 그가 설치된 기판처리장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968869U (ja) * 1982-11-01 1984-05-10 富士精工株式会社 環状メタルシ−ル部を有するバルブ
JPS6138270A (ja) * 1984-07-31 1986-02-24 Fuji Seikou Kk メタルシ−ルを有するゲ−ト弁
JPH0244171U (en, 2012) * 1988-09-21 1990-03-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968869U (ja) * 1982-11-01 1984-05-10 富士精工株式会社 環状メタルシ−ル部を有するバルブ
JPS6138270A (ja) * 1984-07-31 1986-02-24 Fuji Seikou Kk メタルシ−ルを有するゲ−ト弁
JPH0244171U (en, 2012) * 1988-09-21 1990-03-27

Also Published As

Publication number Publication date
JPH077667Y2 (ja) 1995-02-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term