JPH03106890U - - Google Patents
Info
- Publication number
- JPH03106890U JPH03106890U JP1637590U JP1637590U JPH03106890U JP H03106890 U JPH03106890 U JP H03106890U JP 1637590 U JP1637590 U JP 1637590U JP 1637590 U JP1637590 U JP 1637590U JP H03106890 U JPH03106890 U JP H03106890U
- Authority
- JP
- Japan
- Prior art keywords
- pitch
- electrostatic
- stator
- electrodes
- electrostatic actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の実施例を示す側断面図、第２
図は第１図Ａ−Ａ線に沿う断面図、第３図は他の
実施例を示す側断面図、第４図はリニア形にした
例を示す実施例で第５図のＣ−Ｃ線に沿う側断面
図、第５図はＢ−Ｂ線に沿う断面図、第６図は従
来の例を示す平面図、第７図はＤ−Ｄ線に沿う断
面図、第８図は従来の別の実施例を示す断面図で
ある。
１……固定子、２……可動子、３ａ，３ｂ……
静電電極、４ａ，４ｂ……可動子電極、５，６…
…ガイド溝、７……転子、８……スルーホール、
９……接続体である。
Fig. 1 is a side sectional view showing an embodiment of the present invention;
The figure is a sectional view taken along the line A-A in Figure 1, Figure 3 is a side sectional view showing another embodiment, and Figure 4 is an embodiment showing a linear type example taken along the line C-C in Figure 5. 5 is a sectional view taken along line B-B, FIG. 6 is a plan view showing a conventional example, FIG. 7 is a sectional view taken along line D-D, and FIG. 8 is a sectional view taken along line BB. FIG. 7 is a sectional view showing another example. 1...Stator, 2...Movable element, 3a, 3b...
Electrostatic electrodes, 4a, 4b... Mover electrodes, 5, 6...
...Guide groove, 7... Trochanter, 8... Through hole,
9...It is a connection body.
Claims (1)
定子と、前記静電電極に対向して強誘電体部と低
誘電体部とを交互に前記ピツチに関連するピツチ
で配列した可動子とをそなえた静電アクチユエー
タにおいて、 固定子および可動子の対向面に、可動子が移動
する方向のガイド溝と、ガイド溝に挿入した転子
を設け、転子の径に応じて前記ガイド溝の深さを
調整し固定子と可動子のギヤツプを所望の値に保
持することを特徴とする静電アクチユエータ。[Claims for Utility Model Registration] A stator in which a plurality of electrostatic electrodes are arranged at a predetermined pitch, and ferroelectric parts and low dielectric parts facing the electrostatic electrodes are alternately connected to the pitch. In an electrostatic actuator equipped with movable elements arranged at a pitch such that An electrostatic actuator characterized in that the depth of the guide groove is adjusted according to the diameter to maintain a gap between the stator and the mover at a desired value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1637590U JPH03106890U (en) | 1990-02-20 | 1990-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1637590U JPH03106890U (en) | 1990-02-20 | 1990-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106890U true JPH03106890U (en) | 1991-11-05 |
Family
ID=31519644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1637590U Pending JPH03106890U (en) | 1990-02-20 | 1990-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106890U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61295882A (en) * | 1985-06-21 | 1986-12-26 | Canon Inc | Vibration wave motor |
| JPH01152978A (en) * | 1987-12-07 | 1989-06-15 | Mitsubishi Heavy Ind Ltd | Dielectric polarization motor |
-
1990
- 1990-02-20 JP JP1637590U patent/JPH03106890U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61295882A (en) * | 1985-06-21 | 1986-12-26 | Canon Inc | Vibration wave motor |
| JPH01152978A (en) * | 1987-12-07 | 1989-06-15 | Mitsubishi Heavy Ind Ltd | Dielectric polarization motor |