JPS61295882A - Vibration wave motor - Google Patents

Vibration wave motor

Info

Publication number
JPS61295882A
JPS61295882A JP60135391A JP13539185A JPS61295882A JP S61295882 A JPS61295882 A JP S61295882A JP 60135391 A JP60135391 A JP 60135391A JP 13539185 A JP13539185 A JP 13539185A JP S61295882 A JPS61295882 A JP S61295882A
Authority
JP
Japan
Prior art keywords
frictional force
sphere
spheres
contact
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60135391A
Other languages
Japanese (ja)
Inventor
Takayuki Tsukimoto
貴之 月本
Ichiro Okumura
一郎 奥村
Takuo Okuno
奥野 卓夫
Kazuhiro Izukawa
和弘 伊豆川
Hiroyuki Seki
裕之 関
Naoya Kaneda
直也 金田
Hitoshi Mukojima
仁 向島
Akira Hiramatsu
平松 明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60135391A priority Critical patent/JPS61295882A/en
Priority to US06/843,568 priority patent/US4752711A/en
Publication of JPS61295882A publication Critical patent/JPS61295882A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Abstract

PURPOSE:To extend a motor service life by composing the contact of a movable unit with a vibrator of many rotatable spheres, and increasing a frictional force between the spheres and the unit body by the frictional force between the spheres and the vibrator, thereby reducing the wear. CONSTITUTION:Many electromechanical energy converter 1 is mounted on a vibrating plate 2. A movable unit 3 is composed of a ringlike movable structure 3a having U-shaped section of body, an elastic unit 3b of rubber sponge formed on the bottom of the U-shape, wear resistant sphere 3c made of resin or metal contained in the U-shape, and a retainer 3d for holding the positions of the spheres 3c. Only the spheres 3c contact the plate 2, and the frictional force between the plate 3b and the sphere 3c is selected to increase from the frictional force between the plate 2 and the sphere 3c. The contacting position of the sphere 3c with the vibrator 2 moves as the motor is driven, thereby reducing the wear of the sphere 3c.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は振動体に生ぜしめた進行性振動波により振動体
と接してbる移動体を摩擦駆動する、いわゆる振動波モ
ーター特にその移動体の構造に関するものである。
[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a so-called vibration wave motor that frictionally drives a moving body in contact with the vibrating body by progressive vibration waves generated in the vibrating body, and particularly to a vibration wave motor for frictionally driving a moving body in contact with the vibrating body. It's about structure.

〔発明の背景〕[Background of the invention]

振動波モーターの公知例を概略第6図および第7図にて
説明すると、1は電歪素子または磁歪素子など電気機械
工ネルイー変換素子、例えばPZT(チタン酸ジルコン
鉛)である。2はリング状の板の形をした振動体で弾性
物質からなシ、その片面に前記電歪素子lが接着されて
いる。振動体2は電歪素子lと共にステータ(不図示)
側に保持されている。3は移動体でアシ、この例では撮
動体2の他面に対し押圧接触されたリング板状のロータ
を形成している。電歪素子lは振動体2の周方向く複数
個配列されておシ、そのうちの一部の群に対して他の群
は振動波の波長λの1/4波長分だけずれたピッチで配
置される。群内での各電歪素子はA波長のピッチで、相
隣り合うものの極性が逆になるように配置されてbる。
A known example of a vibration wave motor will be schematically explained with reference to FIGS. 6 and 7. Reference numeral 1 is an electromechanical Nehru transducer element such as an electrostrictive element or a magnetostrictive element, for example, PZT (lead zirconium titanate). Reference numeral 2 denotes a ring-shaped vibrating body made of an elastic material, and the electrostrictive element 1 is adhered to one side of the vibrating body. The vibrating body 2 is a stator (not shown) together with an electrostrictive element l.
held on the side. Reference numeral 3 denotes a moving body, which in this example forms a ring plate-shaped rotor that is pressed into contact with the other surface of the moving body 2 . A plurality of electrostrictive elements l are arranged in the circumferential direction of the vibrating body 2, and some groups of the electrostrictive elements l are arranged with a pitch shifted from other groups by 1/4 wavelength of the wavelength λ of the vibration wave. be done. The electrostrictive elements in the group are arranged at a pitch of A wavelength so that adjacent ones have opposite polarities.

このような構成の振動波モーターにおいて一つの群の電
歪素子にVo−8inωTの交流電圧を印加し、もう一
方の群の電歪素子KvO−CO8ωTの交流電圧を印加
すると、各電歪素子は相隣シ合うものどうし極性が逆向
きで二つの群どうし90@位相のずれた交流電圧が印加
されて振動をする。この振動が伝えられて振動体2は電
歪素子1の配置ピッチに従って曲げ振動をする。この曲
げ振動は、振動体2が一つおきの電歪素子の位置で出っ
張ると、他の一つおきの電歪素子の位置で引っ込むとい
う風になる。一方、前記の如く電歪素子の一群は他の一
群に対し、1/4波長ずれた位置にあるため曲げ振動は
電圧素子の配列方向に進行する。交流電圧が印加されて
いる間、次々と振動が励起されて、進行性曲げ振動波と
なって振動体2を周方向に伝わってゆく。
In a vibration wave motor having such a configuration, when an AC voltage of Vo-8inωT is applied to the electrostrictive elements in one group and an AC voltage of KvO-CO8inωT is applied to the electrostrictive elements in the other group, each electrostrictive element becomes Neighboring units have opposite polarities, and an alternating current voltage 90@out of phase is applied to the two groups, causing them to vibrate. This vibration is transmitted, and the vibrating body 2 bends and vibrates in accordance with the arrangement pitch of the electrostrictive elements 1. This bending vibration occurs in such a way that the vibrating body 2 protrudes at every other electrostrictive element position and then retracts at every other electrostrictive element position. On the other hand, as described above, since one group of electrostrictive elements is located at a position shifted by 1/4 wavelength from the other group, the bending vibration advances in the arrangement direction of the voltage elements. While the alternating current voltage is applied, vibrations are excited one after another and become progressive bending vibration waves that propagate in the circumferential direction of the vibrating body 2.

このときの波の進行状態が第7図(a) (b) (c
)(d)に示しである。いま、進行性曲げ振動波が矢示
X1方向に進むとする。0を静止状態に於ける振動体の
中心面とするとこの中心面は振動状態では鎖線で示す中
立面6となり、この中立面6では曲げによる応力が拮抗
している。いま中立面6と直交する断面を一般的に7で
表わし、断面7と中立面6との交線を一般的に5で表わ
し、断面7と振動体2の移動体3側の表面との交線上の
点を一般的にPで表わし、これらを特定的に表わすとき
には、添数字を付して表わすことにする。中立面6と直
交する断面7についてみると、これら二面の交線5では
応力がかからず、交線5は上下振動をするだけである。
The progress state of the wave at this time is shown in Figure 7 (a) (b) (c
) (d). Now, assume that the progressive bending vibration wave advances in the direction of arrow X1. If 0 is the center plane of the vibrating body in a stationary state, this center plane becomes a neutral plane 6 shown by a chain line in a vibrating state, and stress due to bending is balanced on this neutral plane 6. Now, the cross section perpendicular to the neutral plane 6 is generally represented by 7, the line of intersection between the cross section 7 and the neutral plane 6 is generally represented by 5, and the cross section 7 and the surface of the vibrating body 2 on the movable body 3 side are A point on the intersection line of is generally represented by P, and when these are specifically represented, they are represented by a subscript number. Looking at the cross section 7 perpendicular to the neutral plane 6, no stress is applied to the intersection line 5 of these two surfaces, and the intersection line 5 only vibrates vertically.

同時に断面7は交線5t−中心として左右の振)子振動
をする。従って、点Pは上下運動と左右運動を合成した
運動をするが、これを次に詳説する。
At the same time, the cross section 7 vibrates as a pendulum to the left and right with the intersection line 5t as the center. Therefore, point P moves in a combination of vertical and horizontal movements, which will be explained in detail next.

第7図(&)は任意の一時点での状態を示しておシ、面
0と中立面6との交線51 k通る断面71と振動体2
の移動体3側の表面との交線上の点P1は、左右振動の
右死点となっていて上方向運動だけしておシ、他方、波
の正側(面Oの上側)にある交線5!に対応する点P!
には左方向(波の進行方向X1と逆のX、方向)の運動
成分が加わシ、また波の負側(面Oの下側)にある交線
5sに対応する点P3には右方向の運動成分が加わる。
FIG. 7 (&) shows the state at an arbitrary point in time, and shows a cross section 71 passing through the intersection line 51 k of the plane 0 and the neutral plane 6, and the vibrating body 2.
Point P1 on the line of intersection with the surface of the moving body 3 is the right dead center of the left-right vibration, and only upward movement is possible. Line 5! Point P corresponding to !
A motion component in the left direction (X, direction opposite to the wave traveling direction The motion component of is added.

その後、波が進行して、第7図(b) K示すように波
の正側に前記の交線5Kが来ると、点P1は左方向の運
動をすると同時に上方向の運動をする。
Thereafter, as the wave progresses, as shown in FIG. 7(b) K, when the intersection line 5K comes to the positive side of the wave, point P1 moves to the left and at the same time moves upward.

更に同図(、)の時点では読点p、は上下振動の上死点
に来て左方向の運動だけをする。更IC(a)の時点で
は読点P1は左方向の運動と下方向運動をする。
Furthermore, at the time point shown in FIG. Furthermore, at the time of IC(a), reading point P1 moves leftward and downward.

さらに波が進行し、右方向と下方向の運動、右方向と上
方向の運動を経て同図(a)の状態に戻る。他の点P 
@  s P sについても同様のことが云える。
The wave further advances, moving to the right and downward, moving to the right and upward, and then returning to the state shown in FIG. 3(a). Other points P
The same can be said about @s P s.

このような一連の運動過程により点Pは回転楕円運動を
し、その回転半径は、撮動体2の中立面6から移動体側
表面まで(即ち点Pまで)の長さの関数となる。
Through such a series of motion processes, the point P moves in an ellipsoid of revolution, and the radius of rotation thereof is a function of the length from the neutral plane 6 of the photographing body 2 to the moving body side surface (that is, to the point P).

一方、移動体3は振動体2に加圧接触しているので、例
えば第7図(C)に代表的に示すように、移動体2に対
して凸になった振動体2の部分の点P1の回転楕円運動
が移動体3t−X、方向に摩擦駆動する。点P1だけで
なく、振動体2の前記移動体3側の表面上の全ての点が
点P、と同じように移動体3を摩擦駆動する。以上が振
動波モーターの原理である。
On the other hand, since the movable body 3 is in pressure contact with the vibrating body 2, for example, as typically shown in FIG. The spheroidal motion of P1 frictionally drives the moving body 3t-X in the direction. Not only the point P1 but all points on the surface of the vibrating body 2 on the movable body 3 side frictionally drive the movable body 3 in the same way as the point P. The above is the principle of a vibration wave motor.

ところで、かかる振動波モーターにおいて移動体の振動
体との接触面を多数の球面で構成し1点形状で接触する
ように改良したものが本出願人により特願昭60−66
093に開示されている。これにより、撮動体と移動体
との間だ、モーター駆動中、空気膜のはさみこみがなく
なシ、摩擦力の低下がおこらず出力が向上し、また、そ
の接触形状のため摩耗粉が接触部外へ掃き出され摩耗粉
のはさみこみによるモーター停止又は出力低下が起こシ
にくいなどのメリットが得られるが、点で接触している
ため面圧が高く、摩耗が激しいという欠点が伴う。
By the way, in this vibration wave motor, the contact surface of the movable body with the vibrating body is composed of a large number of spherical surfaces, and an improved one is proposed in Japanese Patent Application No. 60-66 by the present applicant.
093. As a result, there is no air film trapped between the camera and the moving body while the motor is running, and the output is improved without reducing the frictional force. Also, due to the contact shape, abrasion particles are removed from the contact area. This has the advantage of preventing the motor from stopping or reducing output due to abrasion powder being swept outside, but it has the disadvantage of high contact pressure due to point contact, resulting in severe wear.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、移動体が振動体と多数点で点接触する
振動モーターにおいて摩耗の問題を軽減し、点接触状態
が長く保ち、モーター寿命を延ばすことにある。
An object of the present invention is to reduce the problem of wear in a vibration motor in which a moving body makes point contact with a vibrating body at multiple points, maintain the point contact state for a long time, and extend the life of the motor.

〔発明の概要〕[Summary of the invention]

本発明の構成上の特徴は、振動波モーターにおいて移動
体の振動体との接触部を回転可能な多数の球で構成し、
核球と移動体本体との間の摩擦力を核球と振動体との間
の摩擦力より大ならしめたことにある。
The structural feature of the present invention is that in the vibration wave motor, the contact portion with the vibrating body of the movable body is composed of a large number of rotatable balls,
The reason is that the frictional force between the nuclear sphere and the main body of the moving body is made greater than the frictional force between the nuclear sphere and the vibrating body.

更に本発明のより好ましい形態においては、核球の移動
体周方向への回転を拘束するよう構成される。
Furthermore, in a more preferable form of the present invention, it is configured to restrict rotation of the nuclear sphere in the circumferential direction of the moving body.

〔発明の実施例〕[Embodiments of the invention]

以下、第1図ないし第5図により本発明の詳細な説明す
る。第1図(&) 、 (b)は本発明の1実施例で、
1は電気−機械エネルギー変換素子(たとえばPZT 
)、2はこれらを多数取付けた撮動板であシ、この部分
の構成は第6図のものと変)な込。
Hereinafter, the present invention will be explained in detail with reference to FIGS. 1 to 5. Figures 1(&) and (b) show one embodiment of the present invention,
1 is an electro-mechanical energy conversion element (for example, PZT
), 2 is a photographic plate with a large number of these attached, and the configuration of this part is different from that shown in Figure 6).

3は移動体であシ、本体たるコ字形断It−有するリン
グ状移動体構造体3a、該コ字形部の底面に設けられた
ゴムスポンジなどの弾性体3b、該コ字形部内に収納さ
れた樹脂・金属などでできた耐摩耗性の球3c、および
核球3cの位置を保持するりテーカ−3dで構成されて
いる。上記の部材3aと3b、および3aと3dは互に
固着接合されているが、その他は接合されていない、振
動体2は振動エネルギーの内部損失の少り例えば真ちゅ
う、鋼などの金属材料で作られる。移動体構造体3&は
金属やプラスチックなど形状をしりかシ保てる材料であ
れば何で作ってもよい。各球3cはリテーナ−3dに設
けられた穴によフ該穴から一部突出するように位置が決
定されている。球3Cだけが振動板2と接触する。弾性
板3bと球3Cとの摩擦力は、振動板2と球3cとの摩
擦力より大きいように選定されている。このため球の回
転運動はほとんど束縛されている。しかし、球には振動
板2からの振動が直接伝わシ、y方向振動とともに振動
板表面の質点運動に伴う2方向の力および振動体のy方
向振動に伴う2軸まわ)のねじれによるX方向の力を受
け(第2図参照)、球は少・しづつ2方向およびX方向
に回転する。したがりて球3Cの振動体2との接触位置
はモーター駆動とともに移動し、球の摩耗が軽減され、
モーター寿命は著しく延びる。
3 is a movable body, a ring-shaped movable body structure 3a having a U-shaped main body, an elastic body 3b such as a rubber sponge provided on the bottom of the U-shaped portion, and an elastic body 3b housed within the U-shaped portion. It consists of a wear-resistant ball 3c made of resin, metal, etc., and a taker 3d that holds the position of the core ball 3c. The above-mentioned members 3a and 3b and 3a and 3d are fixedly joined to each other, but the others are not joined.The vibrating body 2 is made of a metal material such as brass or steel that has low internal loss of vibration energy. It will be done. The moving body structure 3& may be made of any material such as metal or plastic as long as it can maintain its shape. Each ball 3c is positioned in a hole provided in the retainer 3d so that it partially protrudes from the hole. Only the ball 3C contacts the diaphragm 2. The frictional force between the elastic plate 3b and the ball 3C is selected to be greater than the frictional force between the diaphragm 2 and the ball 3c. For this reason, the rotational movement of the ball is almost restricted. However, the vibration from the diaphragm 2 is directly transmitted to the sphere, and in addition to the y-direction vibration, the force in two directions accompanying the movement of the mass on the surface of the diaphragm and the torsion in the (See Figure 2), the ball rotates little by little in two directions and in the X direction. Therefore, the contact position of the ball 3C with the vibrating body 2 moves with the motor drive, reducing wear on the ball.
Motor life is significantly extended.

以上のように球は移動体の周方向へも半径方向へも若干
の回転運動を行う。特に、モーター起動時およびストッ
プ時では、移動体の加速度は最大になシ、球の回転運動
も大きくなる。特に移動体局方向の球の回転運動はモー
ターの立ち上がシ特性およびストップ特性を悪化させる
という問題があるので、次にこの問題を除去した実施例
を述べる。
As described above, the ball makes a slight rotational movement both in the circumferential direction and in the radial direction of the moving body. In particular, when the motor is started and stopped, the acceleration of the moving body is at its maximum and the rotational movement of the ball also increases. In particular, since there is a problem in that the rotational movement of the ball in the direction of the mobile station deteriorates the start-up and stop characteristics of the motor, an embodiment that eliminates this problem will be described next.

第3図(a) 、 (b)に示す実施例においては、移
動体半径方向の巾が球3αの直径より小さい弾性体が周
方向に帯状に延びておシ、これに設けた切欠部で周方向
に球3dと接触するようになっている。
In the embodiment shown in FIGS. 3(a) and 3(b), an elastic body whose width in the radial direction of the movable body is smaller than the diameter of the sphere 3α extends in a band shape in the circumferential direction, and a notch provided in the elastic body extends in the circumferential direction. It comes into contact with the ball 3d in the circumferential direction.

このような弾性体の構造により、球の移動体周方向の摩
擦力は移動半径方向の摩擦力より大きくすることができ
、このため球は移動体周方向には回転し難くなシ、上記
の問題を除くことが可能である。さらに第4図に示す他
の実施例は、第1図の実施例において球3dに移動体周
方向に延びるピン3ei緩く貫通しておくことにより、
球3ciの移動体周方向回転を束縛するようにしたもの
でろ)、前記問題を更に効果的に解決することができる
Due to the structure of such an elastic body, the frictional force of the ball in the circumferential direction of the moving body can be made larger than the frictional force in the radial direction of the moving body, so that the ball does not easily rotate in the circumferential direction of the moving body. It is possible to eliminate the problem. Furthermore, in another embodiment shown in FIG. 4, in the embodiment shown in FIG.
If the rotation of the ball 3ci in the circumferential direction of the moving body is restricted), the above problem can be solved more effectively.

第5図は第1図において移動体構造体のコ字形部の内部
にスポンジなどの柔軟な多孔性材料3f金詰めこんだも
ので、1)、これにより球に付着した摩耗粉を除去吸収
するようにしたものである。
Figure 5 shows a structure in which the U-shaped portion of the movable body structure in Figure 1 is filled with 3 f gold of a flexible porous material such as sponge. This is what I did.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、モーター駆動中に球の撮動体との接触
位置が少しづつ移動するため、摩耗が軽減されて点接触
状態が長く保たれ、モーター寿命が著しく伸びる。tた
球の回転はきわめて微小量でよく、それにともなうモー
ター回転数の低下はきわめて微量でモーター効率の低下
はほとんどない、また振動体と移動体は多数の球で接す
るので、両者間の空気膜はさみ込みによる出力の低下が
なく、また摩耗粉の掃き出し効果もよいことは勿論であ
る。
According to the present invention, since the contact position of the ball with the moving body moves little by little while the motor is being driven, wear is reduced and the point contact state is maintained for a long time, significantly extending the life of the motor. The amount of rotation of the rotated ball is extremely small, and the resulting drop in motor rotational speed is extremely small, resulting in almost no reduction in motor efficiency.Also, since the vibrating body and the moving body are in contact with each other through a large number of spheres, there is no air film between them. Needless to say, there is no reduction in output due to pinching, and the effect of sweeping away wear particles is good.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(、) (b)は本発明の1実施例の縦断面図お
よびAA’に見た図、第2図は説明に用い九察標系を示
す図、第3図(、) (b)は本発明の他の実施例の移
動体の縦断面図およびBB’に見た断面図、第4図およ
び第5図は夫々更に他の異る実施例の移動体をある。 1は電気−機械エネルギー変換素子、 2は振動体、      3は移動体、3aは構造体、
     3bは弾性材、3cは球、       3
dはリテーナ−13eはピン、      3fは清掃
用部材。 第1図(b) 箒2図
Fig. 1 (,) (b) is a longitudinal cross-sectional view of one embodiment of the present invention and a view taken along AA', Fig. 2 is a diagram showing a nine-point system used for explanation, and Fig. 3 (,) ( b) is a longitudinal cross-sectional view and a cross-sectional view taken along BB' of a movable body according to another embodiment of the present invention, and FIGS. 4 and 5 respectively show movable bodies according to still other different embodiments. 1 is an electro-mechanical energy conversion element, 2 is a vibrating body, 3 is a moving body, 3a is a structure,
3b is an elastic material, 3c is a ball, 3
d is a retainer, 13e is a pin, and 3f is a cleaning member. Figure 1 (b) Broom 2

Claims (1)

【特許請求の範囲】[Claims]  電気−機械エネルギー変換素子を複数個配列接合され
た振動体に生ぜしめた進行性振動波によって該振動体と
接触する移動体を摩擦駆動する振動波モーターに於て、
該移動体の該振動体との接触部が回転可能な多数の球に
より構成されており、該球と移動体本体との間の摩擦力
が該球と振動体との間の摩擦力より大であることを特徴
とする振動波モーター。
In a vibration wave motor that frictionally drives a moving body in contact with the vibrating body by a progressive vibration wave generated in a vibrating body in which a plurality of electro-mechanical energy conversion elements are arranged and joined,
The contact portion of the movable body with the vibrating body is composed of a large number of rotatable balls, and the frictional force between the balls and the movable body body is greater than the frictional force between the spheres and the vibrating body. A vibration wave motor characterized by:
JP60135391A 1985-03-29 1985-06-21 Vibration wave motor Pending JPS61295882A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60135391A JPS61295882A (en) 1985-06-21 1985-06-21 Vibration wave motor
US06/843,568 US4752711A (en) 1985-03-29 1986-03-25 Vibration wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60135391A JPS61295882A (en) 1985-06-21 1985-06-21 Vibration wave motor

Publications (1)

Publication Number Publication Date
JPS61295882A true JPS61295882A (en) 1986-12-26

Family

ID=15150611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60135391A Pending JPS61295882A (en) 1985-03-29 1985-06-21 Vibration wave motor

Country Status (1)

Country Link
JP (1) JPS61295882A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645376A (en) * 1987-06-24 1989-01-10 Honda Electronic Ultrasonic driving gear
EP0299415A2 (en) * 1987-07-14 1989-01-18 Honda Electric Co., Ltd. An ultrasonic driving device
JPH01122374A (en) * 1987-10-31 1989-05-15 Honda Electron Co Ltd Ultrasonic driving device
JPH03106890U (en) * 1990-02-20 1991-11-05
JP2008148439A (en) * 2006-12-08 2008-06-26 Canon Inc Oscillation-type actuator and control method therefor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645376A (en) * 1987-06-24 1989-01-10 Honda Electronic Ultrasonic driving gear
EP0299415A2 (en) * 1987-07-14 1989-01-18 Honda Electric Co., Ltd. An ultrasonic driving device
JPH01122374A (en) * 1987-10-31 1989-05-15 Honda Electron Co Ltd Ultrasonic driving device
JPH03106890U (en) * 1990-02-20 1991-11-05
JP2008148439A (en) * 2006-12-08 2008-06-26 Canon Inc Oscillation-type actuator and control method therefor

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