JPH03106411U - - Google Patents
Info
- Publication number
- JPH03106411U JPH03106411U JP1385590U JP1385590U JPH03106411U JP H03106411 U JPH03106411 U JP H03106411U JP 1385590 U JP1385590 U JP 1385590U JP 1385590 U JP1385590 U JP 1385590U JP H03106411 U JPH03106411 U JP H03106411U
- Authority
- JP
- Japan
- Prior art keywords
- fixed surface
- surface plate
- plate
- light source
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1385590U JPH03106411U (zh) | 1990-02-15 | 1990-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1385590U JPH03106411U (zh) | 1990-02-15 | 1990-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106411U true JPH03106411U (zh) | 1991-11-01 |
Family
ID=31517245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1385590U Pending JPH03106411U (zh) | 1990-02-15 | 1990-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106411U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022539984A (ja) * | 2019-07-12 | 2022-09-14 | エーエスエムエル ネザーランズ ビー．ブイ． | 基板形状測定デバイス |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119205A (en) * | 1981-01-17 | 1982-07-24 | Kawasaki Heavy Ind Ltd | Measurement of sectional shape of plate-shaped body |
| JPH01250809A (ja) * | 1988-03-31 | 1989-10-05 | Fujitsu Ltd | プリント配線板の反り量測定用装置 |
-
1990
- 1990-02-15 JP JP1385590U patent/JPH03106411U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119205A (en) * | 1981-01-17 | 1982-07-24 | Kawasaki Heavy Ind Ltd | Measurement of sectional shape of plate-shaped body |
| JPH01250809A (ja) * | 1988-03-31 | 1989-10-05 | Fujitsu Ltd | プリント配線板の反り量測定用装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022539984A (ja) * | 2019-07-12 | 2022-09-14 | エーエスエムエル ネザーランズ ビー．ブイ． | 基板形状測定デバイス |