JPH03106411U - - Google Patents
Info
- Publication number
- JPH03106411U JPH03106411U JP1385590U JP1385590U JPH03106411U JP H03106411 U JPH03106411 U JP H03106411U JP 1385590 U JP1385590 U JP 1385590U JP 1385590 U JP1385590 U JP 1385590U JP H03106411 U JPH03106411 U JP H03106411U
- Authority
- JP
- Japan
- Prior art keywords
- fixed surface
- surface plate
- plate
- light source
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の厚み及び反り量測定装置を示
す平面図、第２図は第１図のＡ−Ａ線断面図、第
３図及び第４図は従来の厚み及び反り量測定装置
を示す断面図である。
１……板、２……固定定盤、３……レーザー光
源、４……ＣＣＤカメラ、５……連結フレーム、
６……サーボモータ、７……ボールネジ。
Fig. 1 is a plan view showing the thickness and warpage measuring device of the present invention, Fig. 2 is a sectional view taken along the line A-A in Fig. 1, and Figs. 3 and 4 show the conventional thickness and warpage measuring device. FIG. 1...Plate, 2...Fixed surface plate, 3...Laser light source, 4...CCD camera, 5...Connection frame,
6... Servo motor, 7... Ball screw.
Claims (1)
、 前記固定定盤の両側端部にそれぞれ水平状態に
対向させたレーザー光源及びＣＣＤカメラと、 前記レーザー光源とＣＣＤカメラとを同期させ
て前記固定定盤の水平方向に前・後進させる移動
機構とを有することを特徴とする板厚及び反り量
測定装置。[Scope of Claim for Utility Model Registration] A fixed surface plate on which a plate as an object to be measured is placed; a laser light source and a CCD camera that are horizontally opposed to each other at both ends of the fixed surface plate; and the laser light source. A plate thickness and warpage measuring device comprising: a moving mechanism that synchronizes the fixed surface plate with a CCD camera and moves the fixed surface plate forward and backward in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1385590U JPH03106411U (en) | 1990-02-15 | 1990-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1385590U JPH03106411U (en) | 1990-02-15 | 1990-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106411U true JPH03106411U (en) | 1991-11-01 |
Family
ID=31517245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1385590U Pending JPH03106411U (en) | 1990-02-15 | 1990-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106411U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022539984A (en) * | 2019-07-12 | 2022-09-14 | エーエスエムエル ネザーランズ ビー．ブイ． | Substrate shape measuring device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119205A (en) * | 1981-01-17 | 1982-07-24 | Kawasaki Heavy Ind Ltd | Measurement of sectional shape of plate-shaped body |
| JPH01250809A (en) * | 1988-03-31 | 1989-10-05 | Fujitsu Ltd | Measuring instrument for curvature quantity of printed wiring board |
-
1990
- 1990-02-15 JP JP1385590U patent/JPH03106411U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119205A (en) * | 1981-01-17 | 1982-07-24 | Kawasaki Heavy Ind Ltd | Measurement of sectional shape of plate-shaped body |
| JPH01250809A (en) * | 1988-03-31 | 1989-10-05 | Fujitsu Ltd | Measuring instrument for curvature quantity of printed wiring board |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022539984A (en) * | 2019-07-12 | 2022-09-14 | エーエスエムエル ネザーランズ ビー．ブイ． | Substrate shape measuring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01149178U (en) | ||
| JPH03106411U (en) | ||
| JPS62115600U (en) | ||
| JPS63111070U (en) | ||
| JPS62121504U (en) | ||
| JPS62117879U (en) | ||
| JPH0375426U (en) | ||
| JPS608629U (en) | waterproof pack for camera | |
| JPS61124344U (en) | ||
| JPS63159710U (en) | ||
| JPH0286263U (en) | ||
| JPH0342583U (en) | ||
| JPH02133000U (en) | ||
| JPH0351551U (en) | ||
| JPS63110356U (en) | ||
| JPH025743U (en) | ||
| JPH0247876U (en) | ||
| JPS61126666U (en) | ||
| JPS6415688U (en) | ||
| JPS6126108U (en) | Precise inspection equipment for metal parts | |
| JPS604558U (en) | Walking beam drive device | |
| JPS63177828U (en) | ||
| JPH01111230U (en) | ||
| JPH0238174U (en) | ||
| JPS62150029U (en) |