JPH03106361U - - Google Patents
Info
- Publication number
- JPH03106361U JPH03106361U JP1338490U JP1338490U JPH03106361U JP H03106361 U JPH03106361 U JP H03106361U JP 1338490 U JP1338490 U JP 1338490U JP 1338490 U JP1338490 U JP 1338490U JP H03106361 U JPH03106361 U JP H03106361U
- Authority
- JP
- Japan
- Prior art keywords
- circular plate
- ring member
- ring
- gripping tool
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Coating Apparatus (AREA)
- Chemical Treatment Of Metals (AREA)
Description
第１図は、本考案に係る把持具を構成するリン
グ部材の平面図、第２図は、本考案に係る把持具
の使用状態を示す一部断面の説明図である。
図中、１……リング部材、２……流体導入孔、
３……固定具、５……緩衝フイルム、Ａ……被処
理円形板状体である。
FIG. 1 is a plan view of a ring member constituting a gripping tool according to the present invention, and FIG. 2 is a partially cross-sectional explanatory view showing the usage state of the gripping tool according to the present invention. In the figure, 1...ring member, 2...fluid introduction hole,
3... Fixture, 5... Buffer film, A... Circular plate-shaped body to be processed.
Claims (1)
用される把持具であつて、内径が把持すべき被処
理円形板状体Ａの直径よりやや小さく、外径がそ
れよりやや大きい複数のリング部材１，１…から
成り、各リング部材は、リング内に貫通する流体
導入孔２を有しており、しかも、各リング部材間
に挿入された、重ね合わせた２枚の被処理円形板
状体の周縁部を当該リング部材で押圧する固定具
３，３′を有していることを特徴とする被処理円
形板状体の把持具。 A gripping tool used when treating only one side of a circular plate-like object with a fluid, which has a plurality of gripping tools whose inner diameter is slightly smaller than the diameter of the circular plate-like object A to be gripped and whose outer diameter is slightly larger than that. Consisting of ring members 1, 1..., each ring member has a fluid introduction hole 2 penetrating into the ring, and two overlapping circular plates to be treated are inserted between each ring member. A gripping tool for a circular plate-shaped object to be processed, characterized in that it has fixtures 3, 3' for pressing the peripheral edge of the circular plate-shaped object with the ring member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1338490U JPH03106361U (en) | 1990-02-14 | 1990-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1338490U JPH03106361U (en) | 1990-02-14 | 1990-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106361U true JPH03106361U (en) | 1991-11-01 |
Family
ID=31516800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1338490U Pending JPH03106361U (en) | 1990-02-14 | 1990-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106361U (en) |
-
1990
- 1990-02-14 JP JP1338490U patent/JPH03106361U/ja active Pending
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