JPS6225149U - - Google Patents
Info
- Publication number
- JPS6225149U JPS6225149U JP1985117510U JP11751085U JPS6225149U JP S6225149 U JPS6225149 U JP S6225149U JP 1985117510 U JP1985117510 U JP 1985117510U JP 11751085 U JP11751085 U JP 11751085U JP S6225149 U JPS6225149 U JP S6225149U
- Authority
- JP
- Japan
- Prior art keywords
- holding hole
- carrier
- carrier body
- workpiece holding
- contracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 2
- 230000005489 elastic deformation Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000012050 conventional carrier Substances 0.000 description 1
Description
第１図は本考案のキヤリヤの一実施例を示す正
面図、第２図は同キヤリヤの別実施例を示す正面
図、第３図及び第４図は本考案のキヤリヤを使用
する平面研摩装置の部分縦断面図及び部分平面図
、第５図は従来のキヤリヤの正面図である。
１０，４０……キヤリヤ、１１，４１……キヤ
リヤ本体、１３，４２……ワーク保持穴、１３，
４３，４４……切溝。
Fig. 1 is a front view showing one embodiment of the carrier of the present invention, Fig. 2 is a front view showing another embodiment of the same carrier, and Figs. 3 and 4 are surface polishing apparatuses using the carrier of the present invention. FIG. 5 is a front view of a conventional carrier. 10,40...Carrier, 11,41...Carrier body, 13,42...Work holding hole, 13,
43,44...cut groove.
Claims (1)
に連なる切溝で半割状に形成し、該キヤリヤ本体
の弾性変形によつて上記ワーク保持穴を拡縮可能
となしたことを特徴とする平面研摩装置用キヤリ
ヤ。 A surface polishing method characterized in that a carrier body having a workpiece holding hole is formed in half with a cut groove connected to the holding hole, and the workpiece holding hole can be expanded or contracted by elastic deformation of the carrier body. Carrier for equipment.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117510U JPS6225149U (en) | 1985-07-31 | 1985-07-31 | |
| DE19863624878 DE3624878A1 (en) | 1985-07-31 | 1986-07-23 | Flat lay machine |
| DE19863644854 DE3644854A1 (en) | 1985-07-31 | 1986-07-23 | Workpiece holder |
| KR1019860006184A KR890003776B1 (en) | 1985-07-31 | 1986-07-29 | Flat grinding machine |
| US06/891,241 US4805348A (en) | 1985-07-31 | 1986-07-29 | Flat lapping machine |
| CH3040/86A CH670416A5 (en) | 1985-07-31 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985117510U JPS6225149U (en) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6225149U true JPS6225149U (en) | 1987-02-16 |
Family
ID=31003094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985117510U Pending JPS6225149U (en) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225149U (en) |
-
1985
- 1985-07-31 JP JP1985117510U patent/JPS6225149U/ja active Pending