JPH03106356U - - Google Patents
Info
- Publication number
- JPH03106356U JPH03106356U JP1351190U JP1351190U JPH03106356U JP H03106356 U JPH03106356 U JP H03106356U JP 1351190 U JP1351190 U JP 1351190U JP 1351190 U JP1351190 U JP 1351190U JP H03106356 U JPH03106356 U JP H03106356U
- Authority
- JP
- Japan
- Prior art keywords
- base material
- masking
- permanent magnet
- depositing
- vacuum arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000873 masking effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図及び第２図はそれぞれ本考案のコーテイ
ングマスキング装置の実施例を示し、第１図は１
実施例の斜視図、第２図は他の実施例の断面図、
第３図は真空アーク蒸着装置の正面図である。 ９……基材、１０……非蒸着部、１１……永久
磁石。
ングマスキング装置の実施例を示し、第１図は１
実施例の斜視図、第２図は他の実施例の断面図、
第３図は真空アーク蒸着装置の正面図である。 ９……基材、１０……非蒸着部、１１……永久
磁石。
Claims (1)
- 真空アーク蒸着法により基材に蒸着するに際し
、基材の非蒸着部に該非蒸着部をマスキングする
永久磁石を装着したコーテイングマスキング装置
。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1351190U JPH03106356U (ja) | 1990-02-14 | 1990-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1351190U JPH03106356U (ja) | 1990-02-14 | 1990-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106356U true JPH03106356U (ja) | 1991-11-01 |
Family
ID=31516924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1351190U Pending JPH03106356U (ja) | 1990-02-14 | 1990-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106356U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63210264A (ja) * | 1987-02-25 | 1988-08-31 | Sumitomo Electric Ind Ltd | 成膜方法 |
-
1990
- 1990-02-14 JP JP1351190U patent/JPH03106356U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63210264A (ja) * | 1987-02-25 | 1988-08-31 | Sumitomo Electric Ind Ltd | 成膜方法 |