JPH03106186U - - Google Patents
Info
- Publication number
- JPH03106186U JPH03106186U JP1431590U JP1431590U JPH03106186U JP H03106186 U JPH03106186 U JP H03106186U JP 1431590 U JP1431590 U JP 1431590U JP 1431590 U JP1431590 U JP 1431590U JP H03106186 U JPH03106186 U JP H03106186U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerator
- compressor
- cryopump
- working gas
- stage cryopanel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 239000003463 adsorbent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431590U JPH03106186U (pt) | 1990-02-16 | 1990-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1431590U JPH03106186U (pt) | 1990-02-16 | 1990-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106186U true JPH03106186U (pt) | 1991-11-01 |
Family
ID=31517684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1431590U Pending JPH03106186U (pt) | 1990-02-16 | 1990-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106186U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10184540A (ja) * | 1996-12-25 | 1998-07-14 | Anelva Corp | クライオポンプ |
-
1990
- 1990-02-16 JP JP1431590U patent/JPH03106186U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10184540A (ja) * | 1996-12-25 | 1998-07-14 | Anelva Corp | クライオポンプ |