JPH03104189U - - Google Patents
Info
- Publication number
- JPH03104189U JPH03104189U JP1337890U JP1337890U JPH03104189U JP H03104189 U JPH03104189 U JP H03104189U JP 1337890 U JP1337890 U JP 1337890U JP 1337890 U JP1337890 U JP 1337890U JP H03104189 U JPH03104189 U JP H03104189U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- gas
- refrigerator
- compressor
- stage cryopanel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005494 condensation Effects 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337890U JPH03104189U (pt) | 1990-02-13 | 1990-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337890U JPH03104189U (pt) | 1990-02-13 | 1990-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03104189U true JPH03104189U (pt) | 1991-10-29 |
Family
ID=31516794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1337890U Pending JPH03104189U (pt) | 1990-02-13 | 1990-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03104189U (pt) |
-
1990
- 1990-02-13 JP JP1337890U patent/JPH03104189U/ja active Pending