JPH0310529U - - Google Patents

Info

Publication number

JPH0310529U

JPH0310529U JP7209189U JP7209189U JPH0310529U JP H0310529 U JPH0310529 U JP H0310529U JP 7209189 U JP7209189 U JP 7209189U JP 7209189 U JP7209189 U JP 7209189U JP H0310529 U JPH0310529 U JP H0310529U

Authority

JP

Japan

Prior art keywords

semiconductor manufacturing

manufacturing jig

heat treatment

core material

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Prior art date

1989-06-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 8
• 238000004519 manufacturing process Methods 0.000 claims description 6
• 238000010438 heat treatment Methods 0.000 claims description 4
• 239000011162 core material Substances 0.000 claims description 3
• 239000000919 ceramic Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1

Cited By (4)