JPH03104800U - - Google Patents
Info
- Publication number
- JPH03104800U JPH03104800U JP1305090U JP1305090U JPH03104800U JP H03104800 U JPH03104800 U JP H03104800U JP 1305090 U JP1305090 U JP 1305090U JP 1305090 U JP1305090 U JP 1305090U JP H03104800 U JPH03104800 U JP H03104800U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- die bonding
- stage
- substrate
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 5
- 238000012790 confirmation Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/743—Apparatus for manufacturing layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305090U JP2502995Y2 (ja) | 1990-02-15 | 1990-02-15 | ダイボンディング装置における接着剤塗布量確認装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305090U JP2502995Y2 (ja) | 1990-02-15 | 1990-02-15 | ダイボンディング装置における接着剤塗布量確認装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03104800U true JPH03104800U (enrdf_load_html_response) | 1991-10-30 |
| JP2502995Y2 JP2502995Y2 (ja) | 1996-06-26 |
Family
ID=31516492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1305090U Expired - Lifetime JP2502995Y2 (ja) | 1990-02-15 | 1990-02-15 | ダイボンディング装置における接着剤塗布量確認装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2502995Y2 (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013048130A (ja) * | 2011-08-29 | 2013-03-07 | Panasonic Corp | 樹脂塗布装置および樹脂塗布方法 |
| WO2013121752A1 (ja) * | 2012-02-16 | 2013-08-22 | パナソニック株式会社 | 樹脂塗布装置および樹脂塗布方法 |
-
1990
- 1990-02-15 JP JP1305090U patent/JP2502995Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013048130A (ja) * | 2011-08-29 | 2013-03-07 | Panasonic Corp | 樹脂塗布装置および樹脂塗布方法 |
| WO2013121752A1 (ja) * | 2012-02-16 | 2013-08-22 | パナソニック株式会社 | 樹脂塗布装置および樹脂塗布方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2502995Y2 (ja) | 1996-06-26 |
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