JPH0310461U - - Google Patents

Info

Publication number
JPH0310461U
JPH0310461U JP6983689U JP6983689U JPH0310461U JP H0310461 U JPH0310461 U JP H0310461U JP 6983689 U JP6983689 U JP 6983689U JP 6983689 U JP6983689 U JP 6983689U JP H0310461 U JPH0310461 U JP H0310461U
Authority
JP
Japan
Prior art keywords
filaments
detecting
thermionic
issuing
disconnected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6983689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6983689U priority Critical patent/JPH0310461U/ja
Publication of JPH0310461U publication Critical patent/JPH0310461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP6983689U 1989-06-16 1989-06-16 Pending JPH0310461U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6983689U JPH0310461U (en:Method) 1989-06-16 1989-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6983689U JPH0310461U (en:Method) 1989-06-16 1989-06-16

Publications (1)

Publication Number Publication Date
JPH0310461U true JPH0310461U (en:Method) 1991-01-31

Family

ID=31605482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6983689U Pending JPH0310461U (en:Method) 1989-06-16 1989-06-16

Country Status (1)

Country Link
JP (1) JPH0310461U (en:Method)

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