JPH03104088U - - Google Patents

Info

Publication number
JPH03104088U
JPH03104088U JP1290890U JP1290890U JPH03104088U JP H03104088 U JPH03104088 U JP H03104088U JP 1290890 U JP1290890 U JP 1290890U JP 1290890 U JP1290890 U JP 1290890U JP H03104088 U JPH03104088 U JP H03104088U
Authority
JP
Japan
Prior art keywords
stator
linear guide
mover
armature
coreless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1290890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1290890U priority Critical patent/JPH03104088U/ja
Priority to DE19914190246 priority patent/DE4190246T1/de
Priority to PCT/JP1991/000170 priority patent/WO1991012648A1/ja
Priority to US07/761,888 priority patent/US5225725A/en
Priority to GB9120346A priority patent/GB2247787B/en
Publication of JPH03104088U publication Critical patent/JPH03104088U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP1290890U 1990-02-13 1990-02-13 Pending JPH03104088U (OSRAM)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1290890U JPH03104088U (OSRAM) 1990-02-13 1990-02-13
DE19914190246 DE4190246T1 (de) 1990-02-13 1991-02-13 Linear-strommotor fuer direktantrieb
PCT/JP1991/000170 WO1991012648A1 (en) 1990-02-13 1991-02-13 Linear dc motor
US07/761,888 US5225725A (en) 1990-02-13 1991-09-18 Linear direct current motor
GB9120346A GB2247787B (en) 1990-02-13 1991-09-24 Linear direct current motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1290890U JPH03104088U (OSRAM) 1990-02-13 1990-02-13

Publications (1)

Publication Number Publication Date
JPH03104088U true JPH03104088U (OSRAM) 1991-10-29

Family

ID=31516353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1290890U Pending JPH03104088U (OSRAM) 1990-02-13 1990-02-13

Country Status (1)

Country Link
JP (1) JPH03104088U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015532825A (ja) * 2012-08-21 2015-11-12 エーエスエムエル ネザーランズ ビー．ブイ． 電磁アクチュエータ、支持体、およびリソグラフィ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015532825A (ja) * 2012-08-21 2015-11-12 エーエスエムエル ネザーランズ ビー．ブイ． 電磁アクチュエータ、支持体、およびリソグラフィ装置

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