JPH0310277U - - Google Patents

Info

Publication number
JPH0310277U
JPH0310277U JP7068689U JP7068689U JPH0310277U JP H0310277 U JPH0310277 U JP H0310277U JP 7068689 U JP7068689 U JP 7068689U JP 7068689 U JP7068689 U JP 7068689U JP H0310277 U JPH0310277 U JP H0310277U
Authority
JP
Japan
Prior art keywords
flap
burn
thermostatic
thermostatic oven
hot air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7068689U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7068689U priority Critical patent/JPH0310277U/ja
Publication of JPH0310277U publication Critical patent/JPH0310277U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す正面図、第
２図はこの考案の動作を説明するための正面図、
第３図は従来のバーンイン処理装置を示す正面図
である。 ２０……外殻体、２１……恒温槽、２２……熱
風循環路、２３……シロツコフアン、２４……開
口部、２５……ヒータ、２６……ダクト、２７…
…フラツプ、２８……ＤＵＴ基板、２９……フラ
ツプ駆動手段、３０ａ，３０ｂ……フラツプ、３
１ａ，３１ｂ……温度検知手段、３２……制御手
段。 Fig. 1 is a front view showing an embodiment of this invention, Fig. 2 is a front view for explaining the operation of this invention,
FIG. 3 is a front view showing a conventional burn-in processing apparatus. 20...Outer shell, 21...Thermostatic chamber, 22...Hot air circulation path, 23...Syrotskov fan, 24...Opening, 25...Heater, 26...Duct, 27...
...Flap, 28...DUT board, 29...Flap driving means, 30a, 30b...Flap, 3
1a, 31b... Temperature detection means, 32... Control means.

Claims (1)

【実用新案登録請求の範囲】 (1) ＩＣを取り付けたＤＵＴ基板を恒温槽内に
入れて加熱状態でバーンイン処理をすることがで
きるようにしたバーンイン処理装置において、 前記恒温槽を外殻体で囲繞して該恒温槽の周囲
に送風手段を備えた熱風循環路を形成し、該恒温
槽の熱風流入側の側壁にフラツプを上下首振り可
能に設け、該フラツプにフラツプ駆動手段を連結
し、前記恒温槽内の上下位置に温度検知手段を各
々設け、これらの温度検知手段が温度差を検知し
た場合に該フラツプ駆動手段を駆動して該フラツ
プを上下に首振り運動させる制御手段を設けたこ
とを特徴とするバーンイン処理装置。 (2) 前記送風手段がシロツコフアンであり、前
記恒温槽の上部に設けられていることを特徴とす
る請求項１記載のバーンイン処理装置。[Scope of Claim for Utility Model Registration] (1) In a burn-in processing device that is capable of performing burn-in processing in a heated state by placing a DUT board on which an IC is attached in a thermostatic chamber, the thermostatic chamber is formed by an outer shell. forming a hot air circulation path equipped with a blowing means around the thermostatic oven; a flap is provided on the side wall of the thermostatic oven on the hot air inflow side so as to be swingable up and down; a flap driving means is connected to the flap; Temperature detection means are provided at upper and lower positions in the thermostatic oven, and control means is provided for driving the flap drive means to swing the flap up and down when these temperature detection means detect a temperature difference. A burn-in processing device characterized by: (2) The burn-in processing apparatus according to claim 1, wherein the air blowing means is a Shiritzko fan, and is provided above the thermostatic oven.
JP7068689U 1989-06-16 1989-06-16 Pending JPH0310277U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7068689U JPH0310277U (en) 1989-06-16 1989-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7068689U JPH0310277U (en) 1989-06-16 1989-06-16

Publications (1)

Publication Number Publication Date
JPH0310277U true JPH0310277U (en) 1991-01-31

Family

ID=31607053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7068689U Pending JPH0310277U (en) 1989-06-16 1989-06-16

Country Status (1)

Country Link
JP (1) JPH0310277U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009281676A (en) * 2008-05-23 2009-12-03 Espec Corp Air-conditioning device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196025A (en) * 1982-05-12 1983-11-15 Hitachi Ltd Aging device for semiconductor, etc.
JPS619853B2 (en) * 1981-03-25 1986-03-26 Kogyo Gijutsuin

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619853B2 (en) * 1981-03-25 1986-03-26 Kogyo Gijutsuin
JPS58196025A (en) * 1982-05-12 1983-11-15 Hitachi Ltd Aging device for semiconductor, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009281676A (en) * 2008-05-23 2009-12-03 Espec Corp Air-conditioning device

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