JPH0299962U - - Google Patents

Info

Publication number
JPH0299962U
JPH0299962U JP665689U JP665689U JPH0299962U JP H0299962 U JPH0299962 U JP H0299962U JP 665689 U JP665689 U JP 665689U JP 665689 U JP665689 U JP 665689U JP H0299962 U JPH0299962 U JP H0299962U
Authority
JP
Japan
Prior art keywords
magnetron cathode
magnet
sputtering device
figures
magnetic flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP665689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP665689U priority Critical patent/JPH0299962U/ja
Publication of JPH0299962U publication Critical patent/JPH0299962U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP665689U 1989-01-24 1989-01-24 Pending JPH0299962U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP665689U JPH0299962U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP665689U JPH0299962U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Publications (1)

Publication Number Publication Date
JPH0299962U true JPH0299962U (enrdf_load_stackoverflow) 1990-08-09

Family

ID=31211006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP665689U Pending JPH0299962U (enrdf_load_stackoverflow) 1989-01-24 1989-01-24

Country Status (1)

Country Link
JP (1) JPH0299962U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011105280A1 (ja) * 2010-02-24 2011-09-01 株式会社 アルバック 磁気回路及びマグネトロンスパッタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011105280A1 (ja) * 2010-02-24 2011-09-01 株式会社 アルバック 磁気回路及びマグネトロンスパッタ装置

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