JPH0299362U - - Google Patents
Info
- Publication number
- JPH0299362U JPH0299362U JP691389U JP691389U JPH0299362U JP H0299362 U JPH0299362 U JP H0299362U JP 691389 U JP691389 U JP 691389U JP 691389 U JP691389 U JP 691389U JP H0299362 U JPH0299362 U JP H0299362U
- Authority
- JP
- Japan
- Prior art keywords
- probe tip
- shape memory
- memory material
- utility
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000012781 shape memory material Substances 0.000 claims description 2
Landscapes
- Measuring Leads Or Probes (AREA)
Description
第１図は本考案の実施例１を示す側面図、第２
図は本考案の実施例２を示す側面図である。 １，４……形状記憶材料製プローブ探針、２…
…プローブ探針支持体、３，６……半導体ＬＳＩ
、５……プローブ探針支持及び配線基板。
図は本考案の実施例２を示す側面図である。 １，４……形状記憶材料製プローブ探針、２…
…プローブ探針支持体、３，６……半導体ＬＳＩ
、５……プローブ探針支持及び配線基板。
Claims (1)
- 半導体ＬＳＩに接触させて使用するプローブ探
針において、該探針を形状記憶材料にて構成した
ことを特徴とするプローブ探針。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP691389U JPH0299362U (ja) | 1989-01-24 | 1989-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP691389U JPH0299362U (ja) | 1989-01-24 | 1989-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0299362U true JPH0299362U (ja) | 1990-08-08 |
Family
ID=31211478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP691389U Pending JPH0299362U (ja) | 1989-01-24 | 1989-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0299362U (ja) |
-
1989
- 1989-01-24 JP JP691389U patent/JPH0299362U/ja active Pending