JPH0299332U - - Google Patents
Info
- Publication number
- JPH0299332U JPH0299332U JP778389U JP778389U JPH0299332U JP H0299332 U JPH0299332 U JP H0299332U JP 778389 U JP778389 U JP 778389U JP 778389 U JP778389 U JP 778389U JP H0299332 U JPH0299332 U JP H0299332U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- metal diaphragm
- strain
- generating portion
- stress sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP778389U JPH0299332U (el) | 1989-01-26 | 1989-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP778389U JPH0299332U (el) | 1989-01-26 | 1989-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0299332U true JPH0299332U (el) | 1990-08-08 |
Family
ID=31213091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP778389U Pending JPH0299332U (el) | 1989-01-26 | 1989-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0299332U (el) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271280A (ja) * | 2006-03-30 | 2007-10-18 | Denso Corp | 圧力センサ |
| JP2013234955A (ja) * | 2012-05-10 | 2013-11-21 | Nippon Soken Inc | 圧力センサおよびその製造方法 |
-
1989
- 1989-01-26 JP JP778389U patent/JPH0299332U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271280A (ja) * | 2006-03-30 | 2007-10-18 | Denso Corp | 圧力センサ |
| JP2013234955A (ja) * | 2012-05-10 | 2013-11-21 | Nippon Soken Inc | 圧力センサおよびその製造方法 |