JPH0298629U - - Google Patents
Info
- Publication number
- JPH0298629U JPH0298629U JP665889U JP665889U JPH0298629U JP H0298629 U JPH0298629 U JP H0298629U JP 665889 U JP665889 U JP 665889U JP 665889 U JP665889 U JP 665889U JP H0298629 U JPH0298629 U JP H0298629U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- gas introduction
- introduction tube
- ashing
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP665889U JPH0298629U (enExample) | 1989-01-24 | 1989-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP665889U JPH0298629U (enExample) | 1989-01-24 | 1989-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0298629U true JPH0298629U (enExample) | 1990-08-06 |
Family
ID=31211010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP665889U Pending JPH0298629U (enExample) | 1989-01-24 | 1989-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0298629U (enExample) |
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1989
- 1989-01-24 JP JP665889U patent/JPH0298629U/ja active Pending