JPH0297322U - - Google Patents
Info
- Publication number
- JPH0297322U JPH0297322U JP454589U JP454589U JPH0297322U JP H0297322 U JPH0297322 U JP H0297322U JP 454589 U JP454589 U JP 454589U JP 454589 U JP454589 U JP 454589U JP H0297322 U JPH0297322 U JP H0297322U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- plate
- detectors
- suction source
- basic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- De-Stacking Of Articles (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP454589U JPH0297322U (enrdf_load_stackoverflow) | 1989-01-19 | 1989-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP454589U JPH0297322U (enrdf_load_stackoverflow) | 1989-01-19 | 1989-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0297322U true JPH0297322U (enrdf_load_stackoverflow) | 1990-08-02 |
Family
ID=31207153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP454589U Pending JPH0297322U (enrdf_load_stackoverflow) | 1989-01-19 | 1989-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0297322U (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06345262A (ja) * | 1993-06-10 | 1994-12-20 | Tokyo Electron Ltd | 処理装置 |
| WO2003037576A1 (fr) * | 2000-06-29 | 2003-05-08 | Shibaura Mechatronics Corporation | Appareil et procede de transfert de substrat |
| CN1298515C (zh) * | 2001-11-01 | 2007-02-07 | 芝浦机械电子装置股份有限公司 | 基板输送装置和基板输送方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60188229A (ja) * | 1984-03-05 | 1985-09-25 | Narasaki Zosen Kk | 段積み荷の移送装置 |
-
1989
- 1989-01-19 JP JP454589U patent/JPH0297322U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60188229A (ja) * | 1984-03-05 | 1985-09-25 | Narasaki Zosen Kk | 段積み荷の移送装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06345262A (ja) * | 1993-06-10 | 1994-12-20 | Tokyo Electron Ltd | 処理装置 |
| WO2003037576A1 (fr) * | 2000-06-29 | 2003-05-08 | Shibaura Mechatronics Corporation | Appareil et procede de transfert de substrat |
| CN1298515C (zh) * | 2001-11-01 | 2007-02-07 | 芝浦机械电子装置股份有限公司 | 基板输送装置和基板输送方法 |