JPH0296726U - - Google Patents
Info
- Publication number
- JPH0296726U JPH0296726U JP489189U JP489189U JPH0296726U JP H0296726 U JPH0296726 U JP H0296726U JP 489189 U JP489189 U JP 489189U JP 489189 U JP489189 U JP 489189U JP H0296726 U JPH0296726 U JP H0296726U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning tank
- ultrasonic
- tank
- ultrasonic waves
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP489189U JPH0296726U (fr) | 1989-01-19 | 1989-01-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP489189U JPH0296726U (fr) | 1989-01-19 | 1989-01-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0296726U true JPH0296726U (fr) | 1990-08-01 |
Family
ID=31207799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP489189U Pending JPH0296726U (fr) | 1989-01-19 | 1989-01-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0296726U (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996021242A1 (fr) * | 1995-01-06 | 1996-07-11 | Tadahiro Ohmi | Procede de nettoyage |
TWI824420B (zh) * | 2020-08-25 | 2023-12-01 | 南韓商杰宜斯科技有限公司 | 基板清洗裝置及其控制方法 |
TWI824469B (zh) * | 2021-04-21 | 2023-12-01 | 南韓商杰宜斯科技有限公司 | 基板清洗裝置 |
-
1989
- 1989-01-19 JP JP489189U patent/JPH0296726U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996021242A1 (fr) * | 1995-01-06 | 1996-07-11 | Tadahiro Ohmi | Procede de nettoyage |
TWI824420B (zh) * | 2020-08-25 | 2023-12-01 | 南韓商杰宜斯科技有限公司 | 基板清洗裝置及其控制方法 |
TWI824469B (zh) * | 2021-04-21 | 2023-12-01 | 南韓商杰宜斯科技有限公司 | 基板清洗裝置 |