JPH0295150U - - Google Patents
Info
- Publication number
- JPH0295150U JPH0295150U JP337289U JP337289U JPH0295150U JP H0295150 U JPH0295150 U JP H0295150U JP 337289 U JP337289 U JP 337289U JP 337289 U JP337289 U JP 337289U JP H0295150 U JPH0295150 U JP H0295150U
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- detector
- semiconductor detector
- ray analyzer
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
Description
第１図は本考案の一実施例を説明するための装
置構成図、第２図は従来例を説明するための図で
ある。
１：半導体検出器、２：冷却槽、３：熱伝導棒
、４：保護筒、５：ベローズ、６：調整ねじ、７
：電子顕微鏡筐筒、８：磁極片、９：試料、１０
：ベリリウム窓、１１：コリメータ。
FIG. 1 is an apparatus configuration diagram for explaining an embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional example. 1: Semiconductor detector, 2: Cooling tank, 3: Heat conduction rod, 4: Protective tube, 5: Bellows, 6: Adjustment screw, 7
: Electron microscope housing, 8: Magnetic pole piece, 9: Sample, 10
: Beryllium window, 11: Collimator.
Claims (1)
と、該半導体検出器を収容し内部が真空に保持さ
れる保護容器を備えたＸ線分析装置において、前
記検出器の前に前記保護筒に気密に接続した先細
りのＸ線通過孔を有するコリメータを設けると共
に、該コリメータ先端の開口部を軽元素膜で封止
し、前記保護容器内と前記コリメータ内を真空に
保持するようにしたことを特徴とするＸ線分析装
置。 In an X-ray analyzer equipped with a semiconductor detector that detects X-rays generated from a sample and a protective container that houses the semiconductor detector and is kept in a vacuum, the protective tube is airtightly placed in front of the detector. A collimator having a tapered X-ray passage hole connected to the collimator is provided, and an opening at the tip of the collimator is sealed with a light element film to maintain a vacuum inside the protective container and the collimator. X-ray analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP337289U JPH0295150U (en) | 1989-01-13 | 1989-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP337289U JPH0295150U (en) | 1989-01-13 | 1989-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295150U true JPH0295150U (en) | 1990-07-30 |
Family
ID=31204951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP337289U Pending JPH0295150U (en) | 1989-01-13 | 1989-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295150U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6417366A (en) * | 1987-07-01 | 1989-01-20 | Rinku Anariteikaru Ltd | Electron beam and x-ray detector |
-
1989
- 1989-01-13 JP JP337289U patent/JPH0295150U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6417366A (en) * | 1987-07-01 | 1989-01-20 | Rinku Anariteikaru Ltd | Electron beam and x-ray detector |
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