JPH029427U - - Google Patents
Info
- Publication number
- JPH029427U JPH029427U JP8766488U JP8766488U JPH029427U JP H029427 U JPH029427 U JP H029427U JP 8766488 U JP8766488 U JP 8766488U JP 8766488 U JP8766488 U JP 8766488U JP H029427 U JPH029427 U JP H029427U
- Authority
- JP
- Japan
- Prior art keywords
- end point
- etching
- chamber
- dry etching
- differential amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 238000001312 dry etching Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims 3
- 238000000295 emission spectrum Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8766488U JPH029427U (bg) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8766488U JPH029427U (bg) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029427U true JPH029427U (bg) | 1990-01-22 |
Family
ID=31312265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8766488U Pending JPH029427U (bg) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029427U (bg) |
-
1988
- 1988-06-30 JP JP8766488U patent/JPH029427U/ja active Pending