JPH0294039A - Information recording medium - Google Patents

Information recording medium

Info

Publication number
JPH0294039A
JPH0294039A JP63243804A JP24380488A JPH0294039A JP H0294039 A JPH0294039 A JP H0294039A JP 63243804 A JP63243804 A JP 63243804A JP 24380488 A JP24380488 A JP 24380488A JP H0294039 A JPH0294039 A JP H0294039A
Authority
JP
Japan
Prior art keywords
recording layer
crystallized
film
information
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63243804A
Other languages
Japanese (ja)
Inventor
Tadashi Kobayashi
忠 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP63243804A priority Critical patent/JPH0294039A/en
Publication of JPH0294039A publication Critical patent/JPH0294039A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable fast erasing of records in a phase-transition type recording medium by providing crystallized thin films having higher m.p. than that of a recording layer on one or both sides of the recording layer and thereby raising the crystallization rate of the recording layer. CONSTITUTION:The recording layer 2 and the crystallized thin film 3 are successively deposited on a substrate 1. Crystals in the crystallized film 3 give seeds of crystallization of the recording layer 2 in the interface of the recording layer and the crystallized film 3 and promote generation of crystal seeds. Since the crystallized film 3 has higher m.p. than that of the recording layer 2, it does not melt or change into an amorphous state by irradiation of laser light. Thereby, the crystallization rate of the recording layer 2 becomes fast, so that records can be erased fast. The same effect can be obtained by providing the crystallized films 3 on the both sides of the layer 2.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、光ビームの照射により記録層の原子配列に変
化を起こさせて情報を記録する情報記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an information recording medium in which information is recorded by causing a change in the atomic arrangement of a recording layer by irradiation with a light beam.

(従来の技術) 近年、大量の情報記録媒体として光ディスクが注目をあ
びている。このうち1回のみの記録が可能な追記型の光
ディスクとしては、レーザビームの照射によって記録膜
に穴をあける方式のもの及び記録膜に隆起部分(バブル
)を形成する方式のもの等があり既に電子式文書ファイ
ル、コンピュータ用データファイル等で実用化されてい
る。
(Prior Art) In recent years, optical discs have been attracting attention as a medium for recording large amounts of information. Among these, write-once optical discs that can be recorded only once include those that use laser beam irradiation to make holes in the recording film, and those that form raised portions (bubbles) on the recording film. It has been put to practical use in electronic document files, computer data files, etc.

一方、−度記録した情報を消去して再度記録が可能ない
わゆる書換形光ディスクの開発も行なわれ一部実用化の
方向にある。このような書換形光ディスクとしては、垂
直磁化膜のスピンの方向を磁場とレーザ光照射条件とで
選択的に変化させる光磁気形ディスクとレーザ光照射条
件によって記録膜の原子配列に変化を起こさせる相変化
型の光ディスクとがある。
On the other hand, so-called rewritable optical discs have been developed and are on the verge of being put into practical use, in which previously recorded information can be erased and re-recorded. Such rewritable optical disks include magneto-optical disks that selectively change the spin direction of a perpendicularly magnetized film depending on the magnetic field and laser beam irradiation conditions, and magneto-optical disks that change the atomic arrangement of the recording layer depending on the laser beam irradiation conditions. There is also a phase change type optical disc.

この相変化型記録媒体としては、ガラスやプラスチック
からなる基板上にGeTe、GeTeSb、GeTe1
n、InSe、5bSe等の半導体や半導体化合物又は
金属間化合物等からなる記録層を積層したものが知られ
ている。この相変化型の記録媒体に情報を記録する際に
は、まず記録媒体の記録層に光ビームを全面照射して結
晶性の高い状態(以下結晶化状態とする)とする。次に
短いパルス幅の強いレーザ光を照射して加熱した後、急
冷して結晶性の搗い状態(以下非晶質状イ(ト。
This phase change recording medium uses GeTe, GeTeSb, GeTe1, etc. on a substrate made of glass or plastic.
A stacked recording layer made of a semiconductor such as n, InSe, or 5bSe, a semiconductor compound, or an intermetallic compound is known. When recording information on this phase-change recording medium, first, the entire recording layer of the recording medium is irradiated with a light beam to bring it into a highly crystalline state (hereinafter referred to as a crystallized state). Next, it is heated by irradiation with a strong laser beam with a short pulse width, and then rapidly cooled to a crystalline state (hereinafter referred to as amorphous state).

態とする)とする。1度記録された情報を消去する際に
は、長いパルス幅の弱いレーザ光を照射し、加熱した後
除冷して元の結晶化状態とする。そして結晶化状態と非
晶質状態との光学的特性の違いを検出することにより情
報を再生している。ところがこのような情報記録媒体に
おいては、記録された情報を消去する際に結晶化の速度
が遅いため、情報の消去か高度になされないという不具
合があ達 った。
). When erasing information that has been recorded once, the material is irradiated with a weak laser beam with a long pulse width, heated, and then slowly cooled to return to its original crystallized state. Information is then reproduced by detecting the difference in optical properties between the crystallized state and the amorphous state. However, in such information recording media, when erasing recorded information, the speed of crystallization is slow, resulting in a problem that the information cannot be erased to a high degree.

(発明が解決しようとする課題) 以−]二、詳述したように、従来の相変化型の情報記録
媒体においては、記録された情報を消去する際に結晶化
に時間を要するため、情報の消去か高速に行なえないと
いう不具合があった。そこで本発明では、記録層の片面
あるいは両面に記録層を構成する材料より融点の高い結
晶化した薄膜を設けることにより、記録層の結晶化の速
度を速めることを目的とした。
(Problems to be Solved by the Invention) Second, as described in detail, in conventional phase-change information recording media, it takes time for crystallization to erase the recorded information, so the information There was a problem that the data could not be erased quickly. Therefore, the present invention aims to increase the speed of crystallization of the recording layer by providing a crystallized thin film having a higher melting point than the material constituting the recording layer on one or both sides of the recording layer.

〔発明の構成〕[Structure of the invention]

(課題を解決するための手段) 本発明では、記録層の片面あるいは両面に記録層を構成
する材料より融点の高い材料からなる結晶化した薄膜を
設けた。前記結晶化した薄膜を構成する材料としては、
Ti、Cr、Ni、Mn。
(Means for Solving the Problems) In the present invention, a crystallized thin film made of a material having a higher melting point than the material constituting the recording layer is provided on one or both sides of the recording layer. The materials constituting the crystallized thin film include:
Ti, Cr, Ni, Mn.

Fe、Co、Cu、Mo、Rh、Pd、Ag、WIr、
Pt、Au、Be、B、Cから選ばれる少なくとも1種
以上の合金薄膜か用いられる。
Fe, Co, Cu, Mo, Rh, Pd, Ag, WIr,
At least one alloy thin film selected from Pt, Au, Be, B, and C is used.

(作用) 記録層の結晶化過程は、結晶核発生過程と結晶成長過程
とからなる。記録層の片面あるいは両面に結晶化した薄
膜を設けることにより、記録層と結晶化膜との接してい
る面で結晶化膜の結晶が記録層の結晶核発生の核となり
、記録層か結晶化するときの結晶核発生の頻度か高くな
る。
(Operation) The crystallization process of the recording layer consists of a crystal nucleation process and a crystal growth process. By providing a crystallized thin film on one or both sides of the recording layer, on the surface where the recording layer and the crystallized film are in contact, the crystals of the crystallized film become the nucleus for the generation of crystal nuclei in the recording layer, causing the recording layer to crystallize. The frequency of crystal nucleation increases when

又、本発明で用いられる結晶化膜の材料は、記録層より
融点が高いため、レーザ光の照射によっても溶解非晶化
することがない。このため記録層の結晶化速度が高速化
され、情報の消去か高速で行なえる。
Furthermore, since the material of the crystallized film used in the present invention has a higher melting point than the recording layer, it does not dissolve and become amorphous even when irradiated with laser light. Therefore, the crystallization speed of the recording layer is increased, and information can be erased at high speed.

(実施例) 以下図面を参照しながら本発明の実施例について説明す
る。
(Example) Examples of the present invention will be described below with reference to the drawings.

まずスパッタリング法により情報記録媒体の試料A、試
料B、試料Cの3種類の試料を製造した。試料A及び試
料Bは本発明による情報記録媒体であり、第1図に示す
ような断面構造を有する。
First, three types of samples of information recording media, sample A, sample B, and sample C, were manufactured by sputtering method. Sample A and sample B are information recording media according to the present invention, and have cross-sectional structures as shown in FIG.

即ち、試料Aはポリカーボネイト樹脂よりなる。That is, sample A is made of polycarbonate resin.

膜厚1100nの基板1上に、In5bTeよりなる膜
厚1100nの記録層2と、Tiよりなる膜厚1100
nの結晶化した薄膜3とが順次積層された構造を有する
。試料Bは、ポリカーボネイト樹脂よりなる膜厚110
0nの基板1」二にIn5bTeよりなる膜厚1100
nの記録層2と、ptよりなる膜厚100r+n+の結
晶化した薄膜3とが順次積層された構造を有する。試料
Cは従来例であり、ポリカーボネイト樹脂よりなる膜厚
1100nの基板上に、In5bTeよりなる膜厚11
00nの記録層を積層した構造を有する。
On a substrate 1 with a thickness of 1100 nm, a recording layer 2 with a thickness of 1100 nm made of In5bTe and a recording layer 2 with a thickness of 1100 nm made of Ti.
It has a structure in which n crystallized thin films 3 are sequentially laminated. Sample B is made of polycarbonate resin and has a film thickness of 110 mm.
A film thickness of 1100 nm made of In5bTe on a substrate of 0n
It has a structure in which an n recording layer 2 and a crystallized thin film 3 made of PT and having a film thickness of 100r+n+ are sequentially laminated. Sample C is a conventional example, in which a film made of In5bTe with a thickness of 11 nm is placed on a substrate made of polycarbonate resin with a film thickness of 1100 nm.
It has a structure in which 00n recording layers are stacked.

これらの情報記録媒体を以下に説明するスパツタリング
法により製造した。
These information recording media were manufactured by the sputtering method described below.

まず第2図にそって、本実施例で用いられるスパッタリ
ング装置の構造について説明する。
First, the structure of the sputtering apparatus used in this embodiment will be explained with reference to FIG.

真空容器4は排出ポート5を介して排気装置6に接続さ
れており、また、ガス導入ポート7を介してアルゴンガ
スボンベ8に接続されている。
The vacuum container 4 is connected to an exhaust device 6 through an exhaust port 5, and is also connected to an argon gas cylinder 8 through a gas introduction port 7.

真空容器4中」二部には、支持装置9とこの支持装置9
に水平に支架された基板1か設けられており、基板1は
支持装置9を軸に回転することができる。
The second part of the vacuum container 4 includes a support device 9 and a support device 9.
A horizontally supported substrate 1 is provided, and the substrate 1 can rotate around a support device 9.

また、真空容器4中底部には、基板1に対面してスパッ
タ源10,11.12が設けられており、これらスパッ
タ源には高周波電源が接続されている。また、スパッタ
源10,11.12の上方にはモニター装置13,14
.15が設置されている。
Furthermore, sputtering sources 10, 11, and 12 are provided at the bottom of the vacuum chamber 4, facing the substrate 1, and a high frequency power source is connected to these sputtering sources. Additionally, monitor devices 13 and 14 are provided above the sputter sources 10 and 11.12.
.. 15 have been installed.

上述のスパッタリング装置を用いて、まず試料Cを製造
した。
First, sample C was manufactured using the above-mentioned sputtering apparatus.

スパッタ源10,11.12として、In5b及びTe
を設置し、真空容器4内を5×1O−6Torrまで排
気した。次にArガスを導入し5X10−3Torrに
全体の圧力を調節した。基板として充分洗浄した外径1
30 mm、板厚1100nの円板状ポリカーボネート
基板を用い、この基板を6 Orpmで回転しつつモニ
タ装f!13.1415により各元素のスパッタ量を検
知して各スパッタ源に投入する電力を制御し、全体の膜
厚が1100nになるまで各元素を堆積させて記録層を
成膜し、試料Cを得た。
In5b and Te are used as sputtering sources 10, 11, 12.
was installed, and the inside of the vacuum container 4 was evacuated to 5×1 O −6 Torr. Next, Ar gas was introduced to adjust the overall pressure to 5×10 −3 Torr. Outer diameter 1 thoroughly cleaned as a substrate
A disk-shaped polycarbonate substrate with a thickness of 30 mm and a plate thickness of 1100 nm was used, and the monitor device f! was rotated at 6 Orpm. 13.1415 was used to detect the amount of sputtering of each element and control the power input to each sputtering source, depositing each element until the total film thickness was 1100 nm to form a recording layer, and sample C was obtained. Ta.

次に試料Aの製造法を述べる。Next, the method for manufacturing sample A will be described.

支持装置9に試料Cと同様の方法で得たポリカーボネイ
ト樹脂よりなる基板上にIn5bTeよりなる記録層を
積層したディスクを支架し、スパッタ源としてTiを設
置した。以下試料Cを製造した時と同様、排気装置6に
より真空容器内を5X10 6Torrまで排気し、次
にアルゴンガスを導入して真空容器内を5X10”To
rrに調節した。ディスクを60 rpmで回転しつつ
モニタ装置により、スパッタ量を調節しつつT1よりな
る薄膜をI n5bTe記録膜上に積層した。Ti膜の
膜厚が100r+mになったところで成膜を止め試料A
を得た。
A disk in which a recording layer made of In5bTe was laminated on a substrate made of polycarbonate resin obtained in the same manner as Sample C was supported on the support device 9, and Ti was installed as a sputtering source. Below, in the same way as when producing sample C, the inside of the vacuum container was evacuated to 5X106 Torr using the exhaust device 6, and then argon gas was introduced to raise the inside of the vacuum container to 5X10''Torr.
Adjusted to rr. A thin film of T1 was laminated on the In5bTe recording film while the disk was rotating at 60 rpm and the amount of sputtering was adjusted using a monitor. When the thickness of the Ti film reached 100r+m, the film formation was stopped and Sample A
I got it.

試料Bは、支持装置9にポリカーボネイト樹脂基板上に
In5bTe記録層を積層したディスクを支架し、スパ
ッタ源としてptを設置し、試料Aと同様の方法で製造
した。
Sample B was manufactured in the same manner as Sample A, by supporting a disk in which an In5bTe recording layer was laminated on a polycarbonate resin substrate on a support device 9, and installing PT as a sputtering source.

以−にのようにして製造された試料A、B、Cに対し、
基板側から、まず短い強いパルス光を照射して非晶質状
態とし、次に長い弱いパルス光を照射して記録層を結晶
化しその時の反射率の経時変化を測定した。第1図には
、横軸に時間軸、縦軸に反射率変化量をとり、試料A、
B、Cに対する反射率の経時変化を示した。この第4図
から明らかなように、本発明による情報記録媒体である
試料A、Bは従来の情報記録媒体であるCに比べて、反
射率の変化が極めて短時間でおこる。これは、記録層と
結晶化薄膜の接しているところで、結晶化膜が結晶核発
生の核となり、記録層が結晶化するときの結晶核発生の
頻度が高くなり、記録層の結晶化が速められるためと思
われる。特に結晶化膜としてTiを用いた場合は、反射
率、熱導電性とも低いため、光ビームによる熱がTi膜
に吸収されて特に記録層の結晶化を速める効果がある。
For samples A, B, and C manufactured as described above,
From the substrate side, first a short, strong pulse of light was irradiated to make it into an amorphous state, and then a long, weak pulse of light was irradiated to crystallize the recording layer, and the change in reflectance over time at that time was measured. In Figure 1, the horizontal axis is the time axis, and the vertical axis is the amount of change in reflectance.
Changes in reflectance over time for B and C are shown. As is clear from FIG. 4, the reflectance of samples A and B, which are information recording media according to the present invention, change in a much shorter time than in sample C, which is a conventional information recording medium. This is because where the recording layer and the crystallized thin film are in contact, the crystallized film becomes a nucleus for crystal nucleation, and when the recording layer crystallizes, the frequency of crystal nucleation increases, causing the recording layer to crystallize faster. It seems that this is because they are being exposed. In particular, when Ti is used as the crystallization film, both the reflectance and thermal conductivity are low, so the heat from the light beam is absorbed by the Ti film, which has the effect of speeding up the crystallization of the recording layer in particular.

本実施例では、記録層の片面のみに結晶化膜を設けたが
、記録層の両面に結晶化膜を設けるとより結晶化を高速
化するのに有効である。
In this example, the crystallized film was provided on only one side of the recording layer, but providing the crystallized film on both sides of the recording layer is effective in speeding up the crystallization.

又、本発明の情報記録媒体は、第4図及び第5図に示す
断面構造を有するものでもよい。
Further, the information recording medium of the present invention may have the cross-sectional structure shown in FIGS. 4 and 5.

第4図の情報記録媒体は、基板1上に、無機物保護層1
6、記録層2、結晶化膜3、無機物保護層16、有機物
保護層17が順次積層された断面構造を有する。無機物
保護層16は、Sin。
The information recording medium shown in FIG. 4 has an inorganic protective layer 1 on a substrate 1.
6. It has a cross-sectional structure in which a recording layer 2, a crystallized film 3, an inorganic protective layer 16, and an organic protective layer 17 are sequentially laminated. The inorganic protective layer 16 is made of Sin.

SiO、TiO、Sb  O、PbO等酸化物、BiF
  、LiF、PbF  、MgF  、BaF、Ca
F、、等の弗化物、BN、Si  N  。
Oxides such as SiO, TiO, SbO, PbO, BiF
, LiF, PbF, MgF, BaF, Ca
Fluorides such as F, BN, SiN.

SiN、AIN等の窒化物のいずれか1種又は2種から
選択された材料よりなり、記録層2の穴明きを防止する
目的で設けられている。有機物保護層17は、紫外線硬
化樹脂からなり、取扱上の傷や埃を防止するために設置
される。
It is made of a material selected from one or two nitrides such as SiN and AIN, and is provided for the purpose of preventing holes in the recording layer 2. The organic protection layer 17 is made of ultraviolet curing resin and is provided to prevent scratches and dust during handling.

第5図は更に、金属あるいは合金からなる反一 対膜18を設けた情報記録媒体の例である。Figure 5 further shows that the This is an example of an information recording medium provided with a counter-film 18.

以上は情報の記録、消去が可能な情報記録媒体に結晶化
膜を設けた場合について述べたが、相変化を利用した1
回のみの記録が行なえる情報記録媒体にも応用すること
ができる。このような情報記録媒体では通常記録層全面
をまず非晶化状態とし、レーザ光照射によって記録層を
結晶化して情報を記録しているので、結晶化膜を記録層
の片面あるいは両面に設けることにより情報の記録が高
速化できる。
The above describes the case where a crystallized film is provided on an information recording medium that can record and erase information.
It can also be applied to information recording media on which only one recording can be performed. In such information recording media, the entire surface of the recording layer is usually first made into an amorphous state, and then the recording layer is crystallized by laser beam irradiation to record information. Therefore, it is necessary to provide a crystallized film on one or both sides of the recording layer. This allows information to be recorded faster.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明の記録層の片面あるいは両
面に結晶化膜を設けた情報記録媒体によれば記録層の結
晶化を速め情報を高速に消去することができる。
As described in detail above, according to the information recording medium of the present invention in which a crystallized film is provided on one or both sides of the recording layer, the crystallization of the recording layer is accelerated and information can be erased at high speed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の1実施例である情報記録媒体の断面構
造図、 第2図は、上記実施例で用いられた情報記録媒体の製造
のためのスパッタリング装置の概略構造図、第3図は、
上記実施例で製造された情報記録媒体及び従来の情報記
録媒体にレーザ光を照射した時の反射率変化量を示した
グラフ、 第4図及び第5図は本発明の他の実施例である情報記録
媒体の断面構造図である。 代理人弁理士  則 近 憲 佑 同        山  下 第 図 第 図 ペル又部 [n5e( 〕 第 図
FIG. 1 is a cross-sectional structural diagram of an information recording medium that is an embodiment of the present invention, FIG. 2 is a schematic structural diagram of a sputtering apparatus for manufacturing the information recording medium used in the above embodiment, and FIG. teeth,
Graphs 4 and 5 showing the amount of change in reflectance when the information recording medium manufactured in the above embodiment and the conventional information recording medium are irradiated with laser light are other embodiments of the present invention. FIG. 2 is a cross-sectional structural diagram of an information recording medium. Representative Patent Attorney Noriyuki Ken Yudo Yamashita Figure Permata Department [n5e ( ) Figure

Claims (1)

【特許請求の範囲】[Claims] 光ビームを照射して、原子配列の変化を生じさせること
により、情報が記録される記録層を有する情報記録媒体
において、前記記録層の片面あるいは両面に前記記録層
より融点の高い結晶化した薄膜を設けたことを特徴とす
る情報記録媒体。
In an information recording medium having a recording layer in which information is recorded by irradiating a light beam to cause a change in atomic arrangement, a crystallized thin film having a melting point higher than that of the recording layer is formed on one or both sides of the recording layer. An information recording medium characterized by being provided with.
JP63243804A 1988-09-30 1988-09-30 Information recording medium Pending JPH0294039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63243804A JPH0294039A (en) 1988-09-30 1988-09-30 Information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63243804A JPH0294039A (en) 1988-09-30 1988-09-30 Information recording medium

Publications (1)

Publication Number Publication Date
JPH0294039A true JPH0294039A (en) 1990-04-04

Family

ID=17109189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63243804A Pending JPH0294039A (en) 1988-09-30 1988-09-30 Information recording medium

Country Status (1)

Country Link
JP (1) JPH0294039A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1039448A2 (en) * 1999-03-26 2000-09-27 Matsushita Electric Industrial Co., Ltd. Phase change recording with crystallization improving layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222249A (en) * 1985-07-19 1987-01-30 Matsushita Electric Ind Co Ltd Optical recording carrier and its production
JPH0242654A (en) * 1988-08-03 1990-02-13 Fuji Electric Co Ltd Optical recording medium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222249A (en) * 1985-07-19 1987-01-30 Matsushita Electric Ind Co Ltd Optical recording carrier and its production
JPH0242654A (en) * 1988-08-03 1990-02-13 Fuji Electric Co Ltd Optical recording medium

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1039448A2 (en) * 1999-03-26 2000-09-27 Matsushita Electric Industrial Co., Ltd. Phase change recording with crystallization improving layer
EP1039448A3 (en) * 1999-03-26 2001-11-14 Matsushita Electric Industrial Co., Ltd. Phase change recording with crystallization improving layer
US6416837B1 (en) 1999-03-26 2002-07-09 Matsushita Electric Industrial Co., Ltd. Information recording medium, a method for manufacturing the same and a method for recording/reproducing information thereon
EP1396853A2 (en) * 1999-03-26 2004-03-10 Matsushita Electric Industrial Co., Ltd. Phase change recording with crystallization improving layer
EP1396853A3 (en) * 1999-03-26 2004-03-17 Matsushita Electric Industrial Co., Ltd. Phase change recording with crystallization improving layer

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