JPH029395U - - Google Patents
Info
- Publication number
- JPH029395U JPH029395U JP8756288U JP8756288U JPH029395U JP H029395 U JPH029395 U JP H029395U JP 8756288 U JP8756288 U JP 8756288U JP 8756288 U JP8756288 U JP 8756288U JP H029395 U JPH029395 U JP H029395U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- vacuum chamber
- sealing surface
- closing lid
- chamber wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Closures For Containers (AREA)
- Details Of Valves (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8756288U JPH029395U (cs) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8756288U JPH029395U (cs) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029395U true JPH029395U (cs) | 1990-01-22 |
Family
ID=31312167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8756288U Pending JPH029395U (cs) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029395U (cs) |
-
1988
- 1988-06-30 JP JP8756288U patent/JPH029395U/ja active Pending
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