JPH0292933U - - Google Patents
Info
- Publication number
- JPH0292933U JPH0292933U JP89689U JP89689U JPH0292933U JP H0292933 U JPH0292933 U JP H0292933U JP 89689 U JP89689 U JP 89689U JP 89689 U JP89689 U JP 89689U JP H0292933 U JPH0292933 U JP H0292933U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- alignment mark
- semiconductor device
- reflects
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP89689U JPH0292933U (enExample) | 1989-01-10 | 1989-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP89689U JPH0292933U (enExample) | 1989-01-10 | 1989-01-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0292933U true JPH0292933U (enExample) | 1990-07-24 |
Family
ID=31200310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP89689U Pending JPH0292933U (enExample) | 1989-01-10 | 1989-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0292933U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04330710A (ja) * | 1990-03-12 | 1992-11-18 | Fujitsu Ltd | レーザトリミング用位置合わせマーク、半導体装置、及び半導体装置の製造方法 |
-
1989
- 1989-01-10 JP JP89689U patent/JPH0292933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04330710A (ja) * | 1990-03-12 | 1992-11-18 | Fujitsu Ltd | レーザトリミング用位置合わせマーク、半導体装置、及び半導体装置の製造方法 |