JPH0292931U - - Google Patents
Info
- Publication number
- JPH0292931U JPH0292931U JP250489U JP250489U JPH0292931U JP H0292931 U JPH0292931 U JP H0292931U JP 250489 U JP250489 U JP 250489U JP 250489 U JP250489 U JP 250489U JP H0292931 U JPH0292931 U JP H0292931U
- Authority
- JP
- Japan
- Prior art keywords
- carrier body
- carrier
- wafers
- erected
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989002504U JPH0713221Y2 (ja) | 1989-01-12 | 1989-01-12 | 半導体ウェハー用キャリア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989002504U JPH0713221Y2 (ja) | 1989-01-12 | 1989-01-12 | 半導体ウェハー用キャリア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0292931U true JPH0292931U (enExample) | 1990-07-24 |
| JPH0713221Y2 JPH0713221Y2 (ja) | 1995-03-29 |
Family
ID=31203323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989002504U Expired - Lifetime JPH0713221Y2 (ja) | 1989-01-12 | 1989-01-12 | 半導体ウェハー用キャリア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713221Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384045A (ja) * | 1986-09-26 | 1988-04-14 | Nec Corp | 半導体ウエハ−の収納容器 |
-
1989
- 1989-01-12 JP JP1989002504U patent/JPH0713221Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6384045A (ja) * | 1986-09-26 | 1988-04-14 | Nec Corp | 半導体ウエハ−の収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713221Y2 (ja) | 1995-03-29 |