JPH0292179U - - Google Patents
Info
- Publication number
- JPH0292179U JPH0292179U JP68189U JP68189U JPH0292179U JP H0292179 U JPH0292179 U JP H0292179U JP 68189 U JP68189 U JP 68189U JP 68189 U JP68189 U JP 68189U JP H0292179 U JPH0292179 U JP H0292179U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- opening
- vacuum
- valve body
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989000681U JPH0540384Y2 (de) | 1989-01-07 | 1989-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989000681U JPH0540384Y2 (de) | 1989-01-07 | 1989-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0292179U true JPH0292179U (de) | 1990-07-23 |
| JPH0540384Y2 JPH0540384Y2 (de) | 1993-10-13 |
Family
ID=31199927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989000681U Expired - Lifetime JPH0540384Y2 (de) | 1989-01-07 | 1989-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540384Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439480A (ja) * | 1990-05-31 | 1992-02-10 | Kokusai Electric Co Ltd | 真空装置用両圧対応型ロードロックバルブ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5676777U (de) * | 1979-11-16 | 1981-06-23 | ||
| JPS6058981U (ja) * | 1983-09-28 | 1985-04-24 | 株式会社 徳田製作所 | 真空バルブ装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1109078A (en) * | 1975-11-05 | 1981-09-15 | Alfred A. Schleppnik | Malodor counteractants |
-
1989
- 1989-01-07 JP JP1989000681U patent/JPH0540384Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5676777U (de) * | 1979-11-16 | 1981-06-23 | ||
| JPS6058981U (ja) * | 1983-09-28 | 1985-04-24 | 株式会社 徳田製作所 | 真空バルブ装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439480A (ja) * | 1990-05-31 | 1992-02-10 | Kokusai Electric Co Ltd | 真空装置用両圧対応型ロードロックバルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0540384Y2 (de) | 1993-10-13 |