JPH0291339U - - Google Patents

Info

Publication number
JPH0291339U
JPH0291339U JP20789U JP20789U JPH0291339U JP H0291339 U JPH0291339 U JP H0291339U JP 20789 U JP20789 U JP 20789U JP 20789 U JP20789 U JP 20789U JP H0291339 U JPH0291339 U JP H0291339U
Authority
JP
Japan
Prior art keywords
outer tank
swinging
wet processing
tank
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069495Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989000207U priority Critical patent/JPH069495Y2/ja
Publication of JPH0291339U publication Critical patent/JPH0291339U/ja
Application granted granted Critical
Publication of JPH069495Y2 publication Critical patent/JPH069495Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
JP1989000207U 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置 Expired - Lifetime JPH069495Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000207U JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000207U JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Publications (2)

Publication Number Publication Date
JPH0291339U true JPH0291339U (enrdf_load_html_response) 1990-07-19
JPH069495Y2 JPH069495Y2 (ja) 1994-03-09

Family

ID=31199029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000207U Expired - Lifetime JPH069495Y2 (ja) 1989-01-05 1989-01-05 半導体ウェハなどのウエット処理装置

Country Status (1)

Country Link
JP (1) JPH069495Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183032U (enrdf_load_html_response) * 1984-11-05 1986-06-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183032U (enrdf_load_html_response) * 1984-11-05 1986-06-02

Also Published As

Publication number Publication date
JPH069495Y2 (ja) 1994-03-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term