JPH0289829U - - Google Patents
Info
- Publication number
- JPH0289829U JPH0289829U JP16999588U JP16999588U JPH0289829U JP H0289829 U JPH0289829 U JP H0289829U JP 16999588 U JP16999588 U JP 16999588U JP 16999588 U JP16999588 U JP 16999588U JP H0289829 U JPH0289829 U JP H0289829U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing tank
- filter
- semiconductor device
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999588U JPH0289829U (cs) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999588U JPH0289829U (cs) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289829U true JPH0289829U (cs) | 1990-07-17 |
Family
ID=31460552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16999588U Pending JPH0289829U (cs) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289829U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012519392A (ja) * | 2009-03-13 | 2012-08-23 | エーエヌディ コーポレーション | 高圧処理器及び高圧シーリング方法 |
-
1988
- 1988-12-28 JP JP16999588U patent/JPH0289829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012519392A (ja) * | 2009-03-13 | 2012-08-23 | エーエヌディ コーポレーション | 高圧処理器及び高圧シーリング方法 |
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