JPH0289342U - - Google Patents
Info
- Publication number
- JPH0289342U JPH0289342U JP16864988U JP16864988U JPH0289342U JP H0289342 U JPH0289342 U JP H0289342U JP 16864988 U JP16864988 U JP 16864988U JP 16864988 U JP16864988 U JP 16864988U JP H0289342 U JPH0289342 U JP H0289342U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- silicon
- diaphragm chip
- semiconductor
- sensitive diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 9
- 239000000463 material Substances 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16864988U JPH0289342U (cs) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16864988U JPH0289342U (cs) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289342U true JPH0289342U (cs) | 1990-07-16 |
Family
ID=31458008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16864988U Pending JPH0289342U (cs) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289342U (cs) |
-
1988
- 1988-12-27 JP JP16864988U patent/JPH0289342U/ja active Pending
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