JPH0289300U - - Google Patents
Info
- Publication number
- JPH0289300U JPH0289300U JP16961188U JP16961188U JPH0289300U JP H0289300 U JPH0289300 U JP H0289300U JP 16961188 U JP16961188 U JP 16961188U JP 16961188 U JP16961188 U JP 16961188U JP H0289300 U JPH0289300 U JP H0289300U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- grooves
- groove
- rows
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Furnace Details (AREA)
Description
第１図は半導体熱処理装置の円筒型の炉を形成
するのに用いられる炉ユニツトを示す一部切欠き
斜視図、第２図は同じく部分拡大断面図、第３図
ははんだリフロー装置の炉を形成するのに用いら
れる炉ユニツトを示す斜視図である。
１，１１……炉ユニツト、３，１３……溝、４
，１４……ヒータエレメント。
Fig. 1 is a partially cutaway perspective view showing a furnace unit used to form a cylindrical furnace for semiconductor heat treatment equipment, Fig. 2 is a partially enlarged sectional view of the same, and Fig. 3 shows a furnace for a solder reflow equipment. FIG. 2 is a perspective view of a furnace unit used to form 1, 11... Furnace unit, 3, 13... Groove, 4
, 14... Heater element.
Claims (1)
エレメントが、各溝内に、溝の深さ方向に複数列
に並ぶように配置されている炉ユニツト。 A furnace unit in which a plurality of grooves are formed before facing the inside of the furnace, and heater elements are arranged within each groove in a plurality of rows in the depth direction of the grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16961188U JPH0289300U (en) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16961188U JPH0289300U (en) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289300U true JPH0289300U (en) | 1990-07-16 |
Family
ID=31459830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16961188U Pending JPH0289300U (en) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289300U (en) |
-
1988
- 1988-12-27 JP JP16961188U patent/JPH0289300U/ja active Pending